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首页> 外文会议>Conference on micromachining and microfabrication process technology XIV; 20090127; San Jose, CA(US) >Sharpened transparent micronozzles fabrication for cell membrane piercing
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Sharpened transparent micronozzles fabrication for cell membrane piercing

机译：锐化的透明微喷嘴制造，用于细胞膜穿刺

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摘要

Sharpened cantilevered nozzles were fabricated combining microsystem technologies and focused ion beam micromachining. Micronozzles consist of silicon chips with silicon oxide microchannels whose micronozzles were reshaped using Focused Ion Beam. Micronozzle body was defined by an aluminum sacrificial layer patterned over a silicon wafer. This layer was surrounded by a deposited silicon oxide structural layer. The chip is defined by a silicon deep reactive ion etching through the wafer. This process releases part of the metal line forming a cantilevered micronozzle. Sharp reshaped micronozzles were achieved by focused ion beam milling. Mechanical tests of silicon oxide nozzles still containing the aluminum sacrificial layer were performed by cell piercing. In some instances, zona pellucida and membrane were crossed without cell lysis, and micronozzles remained intact.
机译：结合了微系统技术和聚焦离子束微加工技术制造了尖锐的悬臂式喷嘴。微喷嘴由带有氧化硅微通道的硅芯片组成，其微喷嘴使用聚焦离子束重塑。微喷嘴体由在硅晶片上构图的铝牺牲层限定。该层被沉积的氧化硅结构层包围。该芯片是通过对硅进行深硅反应离子刻蚀而定义的。该过程释放出金属线的一部分，形成悬臂式微喷嘴。通过聚焦离子束铣削获得了锐利的重塑微喷嘴。仍然包含铝牺牲层的氧化硅喷嘴的机械测试通过电池穿孔进行。在某些情况下，透明带和膜交叉但没有细胞溶解，并且微喷嘴保持完整。

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