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首页> 外文会议>Conference on MOEMS Display and Imaging Systems II; Jan 26-27, 2004; San Jose, California, USA >Electrostatic actuated optical Fabry-Perot switches in passive matrix displays
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Electrostatic actuated optical Fabry-Perot switches in passive matrix displays

机译：无源矩阵显示器中的静电驱动光学Fabry-Perot开关

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摘要

In this paper a new approach for the realisation of a passive matrix image projection display consisting of electrostatic actuated Fabry-Perot filters for digital wavelength switching is presented. The switches either may be working by illumination with polychromatic or with monochromatic light, e.g. by a laser. In the first case the output light has to be filtered at the desired wavelength. In order to define the interferometric properties of the dielectric layers and thus the switching wavelength optical parameters like thickness and refractive index have to be adjusted carefully. The display switches can be adapted either to reflection or transmission mode, depending on whether silicon or quartz is used as substrate material. Especially hexagonal shaped pixel membranes for working either in reflection at a wavelength of 536 nm or in transmission for 500 nm are described. The assembly is arranged matrix-like in rows and columns, where at each intersection point a pixel is located. The switching of a pixel into the 'on'-state is achieved by applying a voltage on the corresponding row and column contact lines of the display. The resulting intersection potential deflects the addressed pixel membrane whereas adjacent pixels are nearly not affected. Actual measurements allow high switching frequencies of about 2 kHz at voltages in the range of 2 - 60 V, depending on the pixel design. The switching contrast maximum is about 80 %, the contrast between addressed and non-addressed adjacent pixels is 75 %.
机译：本文提出了一种新的实现无源矩阵图像投影显示器的方法，该显示器由用于数字波长切换的静电驱动Fabry-Perot滤波器组成。开关可以通过多色或单色光（例如单色光）照明而工作。用激光。在第一种情况下，必须以所需的波长过滤输出光。为了定义介电层的干涉特性，因此必须仔细调节诸如波长和折射率之类的转换波长光学参数。显示开关可以根据反射模式或透射模式进行调整，具体取决于将硅还是石英用作基板材料。特别描述了六边形的像素膜，其用于在536nm的波长下反射或在500nm下透射。组件以矩阵状排列成行和列，在每个交点处都有一个像素。通过在显示器的相应行和列接触线上施加电压，可以将像素切换到“开”状态。所产生的相交电位使寻址的像素膜偏斜，而相邻像素几乎不受影响。实际测量允许在2-60 V范围内的电压下实现约2 kHz的高开关频率，具体取决于像素设计。开关对比度最大值约为80％，寻址和未寻址的相邻像素之间的对比度为75％。

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