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首页> 外文会议>Conference on Optical Design and Testing; 20071112-15; Beijing(CN) >Experimental study on Zeeman-birefringence dual-frequency laser interferometer with mid-frequency difference
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Experimental study on Zeeman-birefringence dual-frequency laser interferometer with mid-frequency difference

机译：塞曼双折射中频差双频激光干涉仪的实验研究

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摘要

With the development of mechanical engineering, the moving velocity of the machine centers and the CMMs are increased to 1000 mm/s. However, at the present time the measurement speed of the commercial heterodyne interferometer can not meet the requirement. The key element of heterodyne interferometer is a dual frequency laser, which produces two lights with different frequency, whose wavelength is used as basic scale for length measurement. The frequency difference of the dual frequency laser is the primary factor which constrains the measurement speed. A new pressure birefringence dual frequency laser was put forward to be the light source of interferometer. Magnetic field was applied on this laser to eliminate frequency difference lock-in, and therefore dual frequency laser with adjustable frequency ranging from 3 MHz to 40 MHz can be obtained, which is called mid-frequency difference. Using the new laser referred above as the light source, the dual frequency laser interferometer system is constructed. Taking the HP 5 528A dual frequency laser interferometer as measuring basis, this dissertation has measured a displacement of 10 mm rang in low speed by experimental system. The standard uncertainty of measurement is less than 0.1 urn, and the linearity is less than 0.002%. Through the measure experiment it is proved that this high speed measurement system is feasible and the system we designed for the new light source is correct. It offers a new way to improve the measurement velocity of dual frequency interferometer system.
机译：随着机械工程学的发展，机器中心和CMM的移动速度提高到1000 mm / s。但是，目前商业外差式干涉仪的测量速度还不能满足要求。外差式干涉仪的关键元件是双频激光器，它会产生两种不同频率的光，其波长用作长度测量的基本标尺。双频激光器的频率差是限制测量速度的主要因素。提出了一种新型的压力双折射双频激光器作为干涉仪的光源。在该激光器上施加磁场以消除频差锁定，因此可以获得频率可调范围为3 MHz至40 MHz的双频激光器，这称为中频差。使用上面提到的新激光器作为光源，构建了双频激光干涉仪系统。本文以HP 5 528A双频激光干涉仪为测量基础，通过实验系统在低速下测量了10 mm范围的位移。测量的标准不确定度小于0.1 urn，线性度小于0.002％。通过测量实验证明，该高速测量系统是可行的，我们为新光源设计的系统是正确的。它为提高双频干涉仪系统的测量速度提供了一种新途径。

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