首页> 外文会议>Conference on Optical Micro- and Nanometrology in Manufacturing Technology; 20040429-20040430; Strasbourg; FR >Studies of the properties of the temporal phase shifting method applied to silicone microelement vibration investigations using the time average method
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Studies of the properties of the temporal phase shifting method applied to silicone microelement vibration investigations using the time average method

机译:使用时间平均法的时间相移方法在有机硅微量元素振动研究中的特性研究

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Numerical simulations of the influence the phase step miscalibration and average intensity differentiation between the frames on the calculated interferogram contrast using the temporal phase shifting method (TPS) are presented. The fringe function includes in its argument the amplitude of vibration studied by the time-average method. Some features of the TPS method known from the interferogram phase calculations are confirmed and properties characteristic to contrast determination are established. Experimental studies of vibration resonant mode patterns of silicone microelements provide corroboration of theoretical and numerical findings.
机译:提出了使用时间相移方法(TPS)的相位模拟失调和帧之间的平均强度差异对计算的干涉图对比度的影响的数值模拟。条纹函数的参数包括通过时间平均方法研究的振动幅度。确认了从干涉图相位计算已知的TPS方法的某些功能,并建立了确定对比度的特性。有机硅微元素的振动共振模式模式的实验研究证实了理论和数值上的发现。

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