Modified linear and circular carrier frequency Fourier transform method applied for studies of vibrating microelements

机译：修正的线性和圆形载频傅里叶变换方法在振动微元素研究中的应用

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Stroboscopic interferometry is the most popular method for investigation of active, vibrating elements. The interferograms obtained in measurement steps may be analysed by temporal phase shifting method or by spatial carrier frequency methods. The first one requires sequential capturing of phase-shifted interferograms which complicates the measurement system and introduces high stability requirements for the setup. The spatial methods need a single interferogram with a proper spatial carrier frequency (SCF), so they are more suitable for dynamic events analysis. The most frequently used spatial method is based on Fourier transform of an interferogram with linear SCF and can be applied to analysis of restricted class of elements represented by quasi-linear fringes. This can be easily expanded by considering elements with circular carrier fringes (CCF). In the paper two approaches to analysis of interferograms with CCF, namely: coordinate transform Fourier transform technique and direct filtering Fourier transform technique are explained. The error analysis of both techniques applied for different classes of interferograms is presented. The methodology of CCF interferogram analysis based on FT methods applied for micromembranes is presented and several exemplary results are given.

机译：频闪干涉法是研究有源振动元件的最流行方法。在测量步骤中获得的干涉图可以通过时间相移方法或通过空间载频方法来分析。第一个要求顺序捕获相移干涉图，这会使测量系统复杂化，并对设置提出了很高的稳定性要求。空间方法需要具有适当空间载波频率（SCF）的单个干涉图，因此它们更适合于动态事件分析。最常用的空间方法是基于具有线性SCF的干涉图的傅立叶变换，可用于分析由准线性条纹表示的有限类元素。通过考虑带有圆形载流子条纹（CCF）的元素，可以轻松扩展此范围。本文介绍了两种使用CCF进行干涉图分析的方法：坐标变换傅立叶变换技术和直接滤波傅立叶变换技术。提出了两种技术应用于不同类别干涉图的误差分析。提出了基于傅立叶变换（FT）方法应用于微膜的CCF干涉图分析方法，并给出了一些示例性结果。

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来源
《Conference on Optical Micro- and Nanometrology in Manufacturing Technology; 20040429-20040430; Strasbourg; FR》|2004年|P.287-298|共12页
会议地点 Strasbourg(FR)
作者
Jacek Kacperski; Malgorzata Kujawinska; Jerzy Krezel;
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作者单位

Institute of Micromechanics and Photonics, Warsaw Univ. of Technology, 8 Sw. A. Boboli St., 02-525 Warsaw, Poland;

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原文格式 PDF
正文语种 eng
中图分类机械计算;
关键词
fringe pattern analysis; spatial carrier frequency; fourier transform method; circular carrier frequency; coordinate transform; active microelements;

机译：条纹图案分析；空间载频；傅里叶变换法；圆形载频；坐标变换；活性微量元素;

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机译：用于数值确定时间函数的傅立叶变换和频率函数的逆傅立叶变换的数字表，以及对运算计算方法的一些应用

Modified linear and circular carrier frequency Fourier transform method applied for studies of vibrating microelements

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