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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US >Model for the expansion dynamics of the laser-induced plasma and fabrication of erbium doped planar waveguides by pulsed laser deposition and laser micromachining for up-con version applications
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Model for the expansion dynamics of the laser-induced plasma and fabrication of erbium doped planar waveguides by pulsed laser deposition and laser micromachining for up-con version applications

机译：用于上转换版本应用的激光诱导等离子体的扩展动力学模型以及通过脉冲激光沉积和激光微加工制造掺do平面波导的模型

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摘要

The dynamics of the laser induced plasma during pulsed laser deposition of BaTiO_3 thin films is studied theoretically and experimentally and related to the resulting film properties. The expansion of the laser induced plasma is modelled taking inelastic collisions between ablated particles and processing gas particles into account. The predictions of the model are in agreement with data from high speed photography of the plasma emission. Pulsed laser deposition with KrF excimer laser radiation (wavelength 248nm, pulse duration 20 ns) is used to grow dense, transparent, amorphous, poly-crystalline and single crystalline erbium doped BaTiO_3 thin films for photonic applications. Visible emission due to up-conversion luminescence (wavelength 528 nm and 548 nm) under excitation with diode laser radiation at a wavelength of 970-985 nm is investigated as a function of the erbium concentration of 1 - 46 mol% and structural film properties. The dielectric films are micro machined to form optical wave guiding structures using Ti:sapphire laser radiation (wavelength 810 nm, pulse duration 63 - 150 fs) by scanning the focussed laser beam relatively to the sample.
机译：理论和实验研究了BaTiO_3薄膜的脉冲激光沉积过程中激光诱导等离子体的动力学，并与所得的膜性能有关。考虑到烧蚀颗粒和处理气体颗粒之间的非弹性碰撞，对激光诱导的等离子体的膨胀进行建模。该模型的预测与来自等离子体发射的高速摄影的数据一致。使用KrF受激准分子激光辐射（波长248nm，脉冲持续时间20 ns）进行脉冲激光沉积可用于生长用于光子应用的致密，透明，非晶，多晶和单晶掺的BaTiO_3薄膜。研究了在波长为970-985 nm的二极管激光辐射的激发下，由于上转换发光（波长528 nm和548 nm）而产生的可见发射与as浓度（1-46 mol％）和结构膜性能的关系。通过相对于样品扫描聚焦的激光束，使用Ti：蓝宝石激光辐射（波长810 nm，脉冲持续时间63-150 fs）进行微加工，以形成光波导结构。

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