首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US >Generation of uniformly spaced and nano-sized structures by interfered femtosecond laser beams
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Generation of uniformly spaced and nano-sized structures by interfered femtosecond laser beams

机译:飞秒激光束的干扰产生均匀间隔和纳米尺寸的结构

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摘要

To correlate femtosecond laser beams in wide region and achieve laser ablation, beam correlators based on coherent optical system were developed. By processing thin films using the systems, uniformly spaced and nano-sized structures were generated. The generated structures were nanohole. grating, nanobump, bead on bump, standing bead. The shape of the structure changed on changing the laser fluence, the number of beams, and the correlation parameters. By peeling the structures, nano-sized materials such as nanomesh and nanobelt were generated.
机译:为了使飞秒激光束在宽范围内相关并实现激光烧蚀,开发了基于相干光学系统的光束相关器。通过使用该系统处理薄膜,可以生成均匀间隔和纳米尺寸的结构。产生的结构是纳米孔。光栅,纳米凹凸,凹凸珠,立珠。结构的形状随激光能量密度,光束数量和相关参数的变化而变化。通过剥离结构,产生了纳米尺寸的材料,例如纳米网和纳米带。

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