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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US >Replication of micro structures in polymers using laser fabricated glass-ceramic stamps
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Replication of micro structures in polymers using laser fabricated glass-ceramic stamps

机译：使用激光制造的玻璃陶瓷印章在聚合物中复制微观结构

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Recently much research on fabrication of polymer micro structures has been carried out. One of the main advantages of using polymer in micro structure fabrication is the easiness of applying replication processes for mass production. A micro stamping process applying heat and pressure, also referred to as hot embossing lithography, can replicate micro-structures on polymer surfaces. By reforming thermoplastics, many micro features can be transferred directly to polymer surfaces. The micro stamping consists of two main steps: a stamp fabrication step and a replication step. Until now, metal or silicon stamps have been used. In this work, photo-etchable glass-ceramic micro stamps are used, which are micro-machined using an excimer laser processing technique. With the laser process, a glass-ceramic stamp can be fabricated quickly and precisely. In addition, a micro stamping device has been designed and developed for this process. Polyvinylchloride (PVC) is used as the replicating polymer because it has a low glass transition temperature (65℃) and good formability. Many micro structures such as micro channels have been produced. The advantages and the limits of using glass-ceramics stamps and stamping with the PVC material are discussed.
机译：最近，已经进行了许多关于聚合物微结构制造的研究。在微结构制造中使用聚合物的主要优点之一是易于应用复制工艺进行批量生产。施加热和压力的微压印工艺（也称为热压印光刻）可以在聚合物表面上复制微结构。通过重整热塑性塑料，可以将许多微特征直接转移到聚合物表面。微型压模包括两个主要步骤：压模制造步骤和复制步骤。到目前为止，已经使用了金属或硅印章。在这项工作中，使用了可光蚀刻的玻璃陶瓷微印章，并使用准分子激光加工技术对其进行了微加工。通过激光工艺，可以快速而精确地制造玻璃陶瓷压模。另外，已经为此工艺设计并开发了一种微冲压设备。聚氯乙烯（PVC）具有低的玻璃化转变温度（65℃）和良好的可成型性，因此被用作复制聚合物。已经产生了许多微结构，例如微通道。讨论了使用玻璃陶瓷压模和用PVC材料压模的优点和局限性。

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