Ultrafast laser applications in semiconductor industry

机译：超快激光在半导体行业中的应用

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As features and dimensions become smaller, traditional laser processing in semiconductor industry are hitting its limitations due to the thermal effects inherited in long pulse processing. Ultrafast lasers become more reliable and are available commercially. However, their industrial applications, though very desirable due to their non-thermal nature processing, are only limited to those with high value added. Current status of ultrafast laser applications in semiconductor industry is reviewed. Shortcomings of current commercial systems are analyzed. Requirements for ultrafast laser based production system and future direction are discussed.

机译：随着特征和尺寸变得越来越小，由于长脉冲加工中继承的热效应，半导体工业中的传统激光加工正受到限制。超快激光器变得更加可靠，并且可以在市场上买到。然而，尽管由于其非热性质的处理而非常期望它们的工业应用，但它们仅限于具有高附加值的那些。综述了半导体行业超快激光应用的现状。分析了当前商业系统的缺点。讨论了基于超快激光的生产系统的要求以及未来的发展方向。

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《Conference on Photon Processing in Microelectronics and Photonics III; 20040126-20040129; San Jose,CA; US》|2004年|P.226-230|共5页
会议地点 San Jose CA(US)
作者
Bo Gu;
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作者单位

GSI Lumonics Inc., 60 Fordham Road, Wilmington, MA, USA 01887;

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会议组织
原文格式 PDF
正文语种 eng
中图分类光电子技术的应用;物理光学（波动光学）;
关键词
ultrafast laser; semiconductor industry; applications; femtosecond; picosecond;

机译：超快激光;半导体工业;应用;飞秒;皮秒;

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专利

1. Density-functional theory approach to ultrafast laser excitation of semiconductors: Application to the A(1) phonon in tellurium - art. no. 054302 [J] . Tangney P., Fahy S. Physical Review, B. Condensed Matter . 2002,第5期

机译：半导体超快激光激发的密度泛函理论方法：在碲中的A（1）声子的应用-艺术。没有。 054302
2. Compact ultrafast semiconductor disk laser: targeting GFP based nonlinear applications in living organisms [J] . Rodrigo Aviles-Espinosa, Susana I.C.O Santos, David Artigas, Biomedical Optics Express . 2011,第4期

机译：紧凑型超快半导体圆盘激光器：针对基于GFP的非线性生物应用
3. ULTRAFAST LASERS: High-power pico- and femtosecond lasers enable new applications [J] . SASCHA WEILER Laser Focus World: The Magazine for the Photonics & Optoelectronics Industry . 2011,第10期

机译：超快激光：高功率皮秒和飞秒激光器可实现新的应用
4. Ultrafast laser applications in semiconductor industry [C] . Bo Gu, SPIE-The International Society for Optical Engineering, SPIE v.5339 Society of Photo-Optical Instrumentation Engineers Conference on Photon Processing in Microelectronics and Photonics . 2004

机译：半导体工业中的超快激光应用
5. Practical Design and Applications of Ultrafast Semiconductor Disk Lasers [D] . Baker, Caleb W. 2017

机译：超快半导体盘激光器的实用设计和应用
6. Compact ultrafast semiconductor disk laser: targeting GFP based nonlinear applications in living organisms [O] . Rodrigo Aviles-Espinosa, George Filippidis, Craig Hamilton, 2011

机译：紧凑型超快半导体圆盘激光器：针对基于GFP的非线性生物应用
7. Practical Design and Applications of Ultrafast Semiconductor Disk Lasers [O] . Baker Caleb W. 2017

机译：超快半导体圆盘激光器的实用设计和应用

Ultrafast laser applications in semiconductor industry

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