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首页> 外文会议>Conference on Photon Processing in Microelectronics and Photonics Jan 21-24, 2002 San Jose, USA >Processing of multi-layer systems using femtosecond, picosecond, and nanosecond laser pulses at different wavelengths
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Processing of multi-layer systems using femtosecond, picosecond, and nanosecond laser pulses at different wavelengths

机译：使用不同波长的飞秒，皮秒和纳秒激光脉冲处理多层系统

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摘要

We performed ablation studies on multi-layer systems at different wavelength ― pulse duration combinations. The multi-layer systems of interest, 150 nm thin indium tin oxide (ITO), 200 nm thin polyaniline (PANI) on 1 μm thick photo resist, and 280 nm PPV/pedot layer-combination on 150 nm thin ITO are optically transparent and used for a variety of industrial applications. One important goal of the study was to determine the possible process window for a complete removal of only the top layer, leaving the remaining layer basically unharmed. The investigations were conducted with the following wavelength ― pulse duration combinations: 800 nm and 180 fs, 800 nm and 5 ps, 266 nm and 150 fs, 266 nm and 5 ns, 532 nm and 5 ns. We generated micro dots, lines and areas to determine the damage threshold, the processing quality and the processing speed for the specified application of selective layer removal. The structures were analyzed by means of optical and atomic force microscopy. In some cases, we observed a strong pulse duration dependence in the ablation threshold, an indication for the observed difficulties using laser pulses in the ns range. Comparative studies at different wavelengths demonstrate that laser pulses in the UV are not necessarily always a first choice to achieve a precise removal of the optically transparent top layer.
机译：我们在多层系统上以不同的波长-脉冲持续时间组合进行了消融研究。感兴趣的多层系统，150 nm薄的铟锡氧化物（ITO），200 nm薄的聚苯胺（PANI）在1μm的光刻胶上以及280 nm PPV / pedot层组合在150 nm的ITO上是光学透明的用于各种工业应用。该研究的一个重要目标是确定可能仅完全去除顶层的工艺窗口，而使其余层基本上不受损害。使用以下波长-脉冲持续时间组合进行研究：800 nm和180 fs，800 nm和5 ps，266 nm和150 fs，266 nm和5 ns，532 nm和5 ns。我们生成了微点，线和面，以确定特定选择层去除应用的损伤阈值，处理质量和处理速度。通过光学和原子力显微镜分析结构。在某些情况下，我们在消融阈值中观察到了强烈的脉冲持续时间依赖性，这表明使用ns范围内的激光脉冲观察到的困难。在不同波长下的比较研究表明，紫外线中的激光脉冲不一定总是实现精确去除光学透明顶层的首选。

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