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Laser Micromachining of Biofactory-on-a-Chip Devices

机译:片上生物工厂设备的激光微加工

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摘要

Excimer laser micromachining provides a flexible means for the manufacture and rapid prototyping of miniaturised systems such as Biofactory-on-a-Chip devices. Biofactories are miniaturised diagnostic devices capable of characterising, manipulating, separating and sorting suspensions of particles such as biological cells. Such systems operate by exploiting the electrical properties of microparticles and controlling particle movement in AC non-uniform stationary and moving electric fields. Applications of Biofactory devices are diverse and include, among others, the healthcare, pharmaceutical, chemical processing, environmental monitoring and food diagnostic markets. To achieve such characterisation and separation, Biofactory devices employ Laboratory-on-a-Chip type components such as complex multilayer microelectrode arrays, microfluidic channels, manifold systems and on-chip detection systems. Here we discuss the manufacturing requirements of Biofactory devices and describe the use of different excimer laser micromachining methods both in stand-alone processes and also in conjunction with conventional fabrication processes such as photolithography and thermal moulding. Particular attention is given to the production of large area multilayer microelectrode arrays and the manufacture of complex cross-section microfluidic channel systems for use in sample distribution and device interfacing.
机译:准分子激光微加工为小型系统(如片上生物工厂设备)的制造和快速原型化提供了灵活的手段。生物工厂是小型化的诊断设备,能够表征,操纵,分离和分类颗粒(如生物细胞)的悬浮液。这样的系统通过利用微粒的电学性质并控制AC不均匀的固定和运动电场中的微粒运动来进行操作。生物工厂设备的应用是多种多样的,其中包括医疗保健,制药,化学加工,环境监测和食品诊断市场。为了实现这种表征和分离,生物工厂设备采用了芯片实验室类型的组件,例如复杂的多层微电极阵列,微流体通道,歧管系统和芯片上检测系统。在这里,我们讨论了生物工厂设备的制造要求,并描述了在独立过程中以及与常规制造过程(如光刻和热成型)结合使用不同的准分子激光微加工方法的方法。特别注意用于样品分配和设备接口的大面积多层微电极阵列的生产以及复杂截面的微流体通道系统的制造。

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