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首页> 外文会议>Conference on X-Ray Mirrors, Crystals, and Multilayers Jul 30-31, 2001, San Diego, USA >Towards the preparation of optical surfaces preserving the coherence of hard x-ray beams
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Towards the preparation of optical surfaces preserving the coherence of hard x-ray beams

机译：致力于制备光学表面，以保持硬X射线束的相干性

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摘要

The properties of optical components are described that are required by synchrotron x-ray scattering techniques needing to fully exploit the coherence properties of third-generation sources. For example, phase imaging and microfocusing applications require reflecting surfaces with errors much smaller than a nanometer up to spatial frequencies in the mm~(-1) range while keeping roughness on the sub-Angstrom level. The two major challenges being addressed in this paper are the accuracy of the metrology and the technology of the machining based on the metrology for deterministic corrections. The low emittance and the stability of the synchrotron source combined with x-ray position sensitive detectors are suitable to measure the reference wavefront with picometer accuracy. The deformation of this wavefront by a reflecting mirror leads to surface error maps whose accuracy corresponds to the conditions for coherence preservation. These maps are used as an input for an ion-beam milling machine correcting these height errors on grazing incidence mirrors. First results are presented and limits of these techniques including possibilities of multilayer corrections are discussed.
机译：描述了同步加速器X射线散射技术所需的光学组件的特性，这些技术需要充分利用第三代光源的相干特性。例如，相位成像和微聚焦应用要求反射表面的误差远小于纳米，直到mm _（-1）范围内的空间频率，同时还要保持亚埃级的粗糙度。本文要解决的两个主要挑战是计量的准确性和基于计量的确定性校正加工技术。同步辐射源的低发射率和稳定性以及X射线位置敏感检测器适合以皮米计精度测量参考波前。该波前被反射镜的变形导致表面误差图，其精度对应于相干保持的条件。这些图用作离子束铣床的输入，以校正掠入射反射镜上的这些高度误差。给出了初步结果，并讨论了这些技术的局限性，包括多层校正的可能性。

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