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首页> 外文会议>Conference on Recent Developments in Traceable Dimensional Measurements Jun 20-21, 2001, Munich, Germany >Improved calibration of an interference microscope
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Improved calibration of an interference microscope

机译：改进了干涉显微镜的校准

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The calibration of our interference microscope is currently performed by an elaborate multi step process. As a result the total uncertainty of a measurement performed with the interference microscope is much larger than the intrinsic repeatability of the microscope which is of the order of 1 nm. A major contribution to the total uncertainty is a length dependent factor, resulting from a calibration step using gauge blocks that finally yields 8 nm uncertainty for a step height of 2 μnovel step-height standard and calibration procedure. The standard is adjustable and can be simultaneously measured with the interference microscope and a laser interferometer allowing calibration of the entire dynamic range of the microscope with a single artefact. The new calibration method eliminates the process that contributes most to the total uncertainty budget in the current procedure. A possible implementation of the step-height standard is presented.
机译：目前，我们的干涉显微镜的校准是通过精心设计的多步过程进行的。结果，用干涉显微镜进行的测量的总不确定度远大于显微镜的固有重复性，其约为1 nm。对总不确定度的主要贡献是长度相关的因素，这是由于使用量规块进行的校准步骤而产生的，对于2μnovel的台阶高度标准品的台阶高度和校准程序，最终会产生8 nm的不确定性。该标准件是可调的，可以同时通过干涉显微镜和激光干涉仪进行测量，从而可以通过单个伪像来校准显微镜的整个动态范围。新的校准方法消除了在当前程序中对总不确定性预算贡献最大的过程。提出了步高标准的可能实现方式。

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