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首页> 外文会议>Conference on Recent Developments in Traceable Dimensional Measurements Jun 20-21, 2001, Munich, Germany >Characterization of inductance probe for gauge block measurement by Fizeau interferometer
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Characterization of inductance probe for gauge block measurement by Fizeau interferometer

机译：用Fizeau干涉仪测量量块的电感探头的特性

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摘要

Inductance probes are widely used in gauge block comparators. They have to be calibrated by interferometer to fulfill the traceability. To avoid the nonlinearity of interferometer within one interference fringe, a combination of digital and analog servo driving device with integer number of fringe orders of Fizeau interferometer is used to provide the movement for probe calibration. The standard deviation of positioning repeatability of the driving device is about 1 nm. Calibration is performed with double probe arrangement to simulate the actual condition of probes used in gauge block comparators. Typical sensitivity of probes is about 0.31412 V/μm with standard deviation of 0.087% while nonlinearity is about 9 nm over measuring range of +- 10 μm. A 0.33% difference of sensitivity is observed if single probe is arranged in the calibration.
机译：电感探头广泛用于量规比较器。它们必须通过干涉仪进行校准才能实现可追溯性。为了避免干涉仪在一个干涉条纹内出现非线性，将数字和模拟伺服驱动设备与Fizeau干涉仪的条纹数量为整数的组合用于提供探头校准的运动。驱动装置的定位重复性的标准偏差为约1nm。使用双探头装置进行校准，以模拟量规比较器中使用的探头的实际状况。探头的典型灵敏度约为0.31412 V /μm，标准偏差为0.087％，而在±10μm的测量范围内，非线性约为9 nm。如果在校准中配置单个探头，则观察到的灵敏度差异为0.33％。

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