首页> 外文会议>Conference on Recent Developments in Traceable Dimensional Measurements Jun 20-21, 2001, Munich, Germany >Scientific basis for traceable dimensional measurements in a nanometre range: methods and concepts
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Scientific basis for traceable dimensional measurements in a nanometre range: methods and concepts

机译:纳米范围内可追溯尺寸测量的科学依据:方法和概念

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New parallax-free methods of interferometric length measurements, developed recently at INMETRO (Brazil), give the possibility to exclude, practically completely, the uncertainties related to the wringing procedure of a gauge block to a reference plate. It is shown experimentally that the uncertainty of the length measurement by optical interferometry can be reduced to the value of about 1 A. The temperature measurements of a material artefact are demonstrated with the uncertainty of less than 0.1 milli-Kelvin. There are no basic restrictions for the improvement of the practical realization of the SI length unit, based on the measurements of material length standards by optical interferometry to the level of ~0,001 ppm. Two new, independent length specifying parameter for a gauge block are introduced, i.e. the mechanical and optical lengths of a block, which correspond to the length measurements with the uncertainty level indicated above. Parallax-free measurements of the optical length of the block has been performed for a "free" block in unperturbed state. Basically new concept for length metrology, i.e. the concept of a free, unperturbed artefact, has been introduced into the length measurements.
机译:巴西INMETRO最近开发了新的无视差干涉长度测量方法,该方法几乎可以完全排除与量规拧到参考板有关的不确定性。实验表明,通过光学干涉术进行长度测量的不确定度可以降低到大约1 A的值。材料伪影的温度测量结果证明,其不确定度小于0.1毫开尔文。对SI长度单位的实际实现的改进没有基本限制,基于光学干涉法对材料长度标准的测量达到〜0.001 ppm的水平。引入了用于量规块的两个新的,独立的长度指定参数,即,块的机械长度和光学长度,其与具有上述不确定度水平的长度测量相对应。已对处于不受干扰状态的“自由”块执行了块光学长度的无视差测量。长度测量基本上是新的概念,即自由,不受干扰的人工制品的概念。

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