• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>Conference on Recent Developments in Traceable Dimensional Measurements Jun 20-21, 2001, Munich, Germany >Gauge block interferometer using three frequency-stabilized lasers
【24h】

Gauge block interferometer using three frequency-stabilized lasers

机译：使用三个稳频激光器的量块干涉仪

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

We have developed a gauge block measurement system that uses three frequency-stabilized lasers. The stabilized lasers are as follows: an I_2-stabilized offset locked He-Ne laser (633 nm), an I_2-stabilized Nd:YAG laser (532 nm), and a Rb-stabilized diode laser (780 nm). The I_2-stabilized offset locked He-Ne laser is commercially available (Nihonkagaku Engineering Co., Ltd.) and its relative wavelength uncertainty is 2.5 X10~(-11). An I_2-stabilized Nd:YAG laser and a Rb-stabilized diode laser was developed in our institute and their relative wavelength uncertainties are 5X10~(-12) and 1 X 10~(-9), respectively. In the measurement system, laser beams were introduced to the interferometer using an optical multimode fiber. An interferometric fringe pattern was taken using a CCD camera and the excess fraction parts were calculated from the fringe pattern using the Fourier transform method. The excess fraction part obtained from the Rb-stabilized semiconductor laser was used only to determine the integer part of the fringe order, because the accuracy and stability of the wavelength were not sufficient for the long gauge block measurements. This interferometer can measure gauge blocks of up to 1000 mm long and the standard uncertainty of the interferometer is about 75 nm for a 1000 mm long gauge block.
机译：我们已经开发了使用三个频率稳定激光器的量块测量系统。稳定的激光器如下：I_2稳定的偏移锁定He-Ne激光器（633 nm），I_2稳定的Nd：YAG激光器（532 nm）和Rb稳定的二极管激光器（780 nm）。 I_2稳定的偏置锁定He-Ne激光器是可商购的（日本化学工程有限公司），其相对波长不确定度为2.5 X10〜（-11）。我院研制了I_2稳定的Nd：YAG激光器和Rb稳定的二极管激光器，它们的相对波长不确定度分别为5X10〜（-12）和1 X 10〜（-9）。在测量系统中，使用光学多模光纤将激光束引入干涉仪。使用CCD相机拍摄干涉条纹图，并使用傅立叶变换法从条纹图计算出多余的分数部分。从Rb稳定的半导体激光器获得的多余分数部分仅用于确定条纹阶数的整数部分，因为波长的精度和稳定性不足以进行长规格块测量。该干涉仪可以测量长达1000 mm的量块，对于1000 mm长的量块，干涉仪的标准不确定度约为75 nm。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号