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首页> 外文会议>Conference on Recent Developments in Traceable Dimensional Measurements Jun 20-21, 2001, Munich, Germany >Calibration of a 2D reference mirror system of a photomask measuring instrument
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Calibration of a 2D reference mirror system of a photomask measuring instrument

机译：光掩模测量仪器的2D参考镜系统的校准

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A photomask measuring instrument was developed and built at METAS. The instrument consists of an air bearing x-y stage for the positioning of the mask with a range of 400 mm x 300 mm, a digital video microscope system for the localization of the structures and a differential two axis plane mirror interferometer. The interferometric measurements are made with respect to an x-y reference mirror system made out of Zerodur. The uncertainty for 2D measurements is directly influenced by the shape of the reference system i.e. by the straightness and orthogonality of the mirrors. Through a precise characterization of the reference system its imperfections can be corrected numerically. An initial determination of the mirror shape was performed on a straighmess measurement instrument consisting of a granite beam with an air bearing carriage and an inductive touch probe system. The method delivered initial flatness data with a high positional resolution but with some low order distortion due to a circular bending of the used granite beam which was induced by small temperature gradients. An in-situ calibration of the reference system on the photomask measuring instrument itself was used to improve these initial measurements. This second calibration was made by measurements of a 400 mm quartz line scale in axial and in two diagonal directions. By numerical simulation of these measurements the x- and y- mirror shapes and the angle between the mirrors were determined. Circular and sinusoidal functions were used for the additional mirror form corrections, which were up to 40 run for the y-axis and up to 140 nm for the x-axis. A final verification measurement showed that the agreement between the axial and the diagonal line scale measurements is now better than 10 nm.
机译：在METAS开发并制造了一种光掩模测量仪器。该仪器包括一个空气轴承x-y平台，用于定位范围为400 mm x 300 mm的掩模，一个用于定位结构的数字视频显微镜系统以及一个差分两轴平面镜干涉仪。相对于由Zerodur制成的x-y参考镜系统进行干涉测量。 2D测量的不确定性直接受到参考系统形状的影响，即受到反射镜的直线度和正交性的影响。通过对参考系统的精确表征，可以对缺陷进行数字校正。镜子形状的初始确定是在Straighmess测量仪器上进行的，该仪器由带空气轴承滑架和感应式测头系统的花岗岩横梁组成。该方法提供的初始平面度数据具有较高的位置分辨率，但由于所使用的花岗岩梁由于较小的温度梯度而产生的圆形弯曲，因此具有一些低阶失真。在光掩模测量仪器上对参考系统进行原位校准，以改善这些初始测量结果。通过在轴向和两个对角线方向上测量400 mm石英线刻度来进行第二次校准。通过这些测量的数值模拟，可以确定x和y反射镜的形状以及反射镜之间的角度。圆形和正弦函数用于其他镜面形状校正，y轴最大40行程，x轴最大140 nm。最终验证测量结果表明，轴向和对角线刻度测量之间的一致性现在优于10 nm。

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