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首页> 外文会议>Conference on Silicon-Based and Hybrid Optoelectronics Ⅳ Jan 23-24, 2002, San Jose, USA >MOEMS based on combination of moving planar waveguides and mechanical structures
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MOEMS based on combination of moving planar waveguides and mechanical structures

机译：基于移动平面波导和机械结构组合的MOEMS

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Even if a lot of applications are today focused on optical communications, other industrial fields can also take benefit from the advantages offered by MOEMS solutions. Many Optical MEMS are based on electro-mechanical devices providing optical function, for example moving micro-mirrors for optical switches, attenuators or scanners. But LETI and a few other labs have also developed an original MOEMS technology by combining on the same substrate integrated optical planar waveguides with micro-mechanical structures. To reach this aim, a specific "silica micro-machining" technology has been developed. Based on the moving waveguide technology, LETI have fabricated a micro-vibration sensor for the surveillance of rotating machines in electrical generators and optical switches for optical network protection and reconfiguration. Other devices are also based on silica micro-machining technology since they use moving silica optical structures, for example micro-lenses for micro-scanners. After general ideas on definitions and Optical MEMS applications, the paper continues with a short overview of the state of the art of Optical MEMS based on moving waveguides. Then it is more focused on silica on silicon technology. Specific technological problems are presented and the discussion is illustrated by the work carried out by LETI in this area.
机译：即使当今有许多应用专注于光通信，其他工业领域也可以从MOEMS解决方案提供的优势中受益。许多光学MEMS基于提供光学功能的机电设备，例如用于光学开关，衰减器或扫描仪的移动微镜。但是LETI和其他一些实验室还通过在同一衬底上结合具有微机械结构的集成光学平面波导来开发了原始的MOEMS技术。为了达到这个目的，已经开发了一种特殊的“二氧化硅微加工”技术。 LETI基于移动波导技术，制造了一种微振动传感器，用于监视发电机中的旋转机械以及用于光学网络保护和重新配置的光开关。其他设备也基于二氧化硅微加工技术，因为它们使用移动的二氧化硅光学结构，例如用于微扫描仪的微透镜。在对定义和光学MEMS应用进行一般性思考之后，本文继续简要概述了基于移动波导的光学MEMS技术的现状。然后，它更专注于硅基二氧化硅技术。提出了具体的技术问题，并由LETI在该领域进行的工作说明了讨论。

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