Comparison among Several Suppliers of Metallurgical-Grade Silicon

机译：几家冶金级硅供应商的比较

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Metallurgical-grade silicon (silicon metal) is used as a raw material of semiconductor-grade polycrystalline silicon. Impurities in the silicon metal have much influence on both the quality of our final product and the productivity of its manufacturing process. Some data are shown about impurities contents in the silicon metal from several suppliers. Also the influence of impurities mentioned above is discussed and the desirable level of impurities for us is shown.

机译：冶金级硅（金属硅）用作半导体级多晶硅的原料。硅金属中的杂质对最终产品的质量及其制造过程的生产率都有很大影响。一些供应商提供了一些有关硅金属中杂质含量的数据。还讨论了上述杂质的影响，并显示了我们所需的杂质含量。

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来源
《Conference on Silicon for the Chemical Industry VI; 20020617-20020621; Loen; NO》|2002年|P.197-200|共4页
会议地点 Loen(NO)
作者
I. Araki; T. Yamamoto; Y. Tokuda; H. Momose;
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作者单位

Tokuyama Corporation, 7-24 Harumi-cho, Tokuyama, Yamaguchi 745-8648, Japan;

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原文格式 PDF
正文语种 eng
中图分类硅Si;
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5. Comparison among Several Suppliers of Metallurgical-Grade Silicon [C] . I. Araki, T. Yamamoto, Y. Tokuda, Conference on silicon for the chemical industry . 2002

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Comparison among Several Suppliers of Metallurgical-Grade Silicon

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