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首页> 外文会议>Conference on Silicon for the Chemical Industry VI; 20020617-20020621; Loen; NO >The Mechanism of the MethylChlorosilane Reaction: Improved Lab Reactor Design and Kinetic Data
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The Mechanism of the MethylChlorosilane Reaction: Improved Lab Reactor Design and Kinetic Data

机译：甲基氯硅烷反应的机理：改进的实验室反应器设计和动力学数据

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摘要

An extensive laboratory reaction kinetics study was performed on the "Direct Process" of methylchloride and silicon, also commonly referred to as the MethylChloroSilane (MCS) reaction. Temperature and concentrations of copper, zinc, and tin were varied. Reaction rate reproducibility and repeatability were improved by increasing temperature homogeneity in our fixed bed reactor system. A stripped gas chromatograph (GC) oven, a detailed standard operating procedure, and small diameter fixed bed reactors were used to achieve good temperature control. The kinetics study incorporated multiple sample points per run as opposed to single sample. The complete kinetics data set was analyzed with statistical analysis tools (SAS, Minitab). Three silicon utilization windows (0%-15%, 15% to 30%, 30% and above) were assumed to determine reaction rate descriptions by so-called transfer functions. The developed model supports a proposal wherein at least two processes exist. The main reaction, the MCS reaction produces dimethyldichlrorsilane (Di) and equimolar amounts of trimethylchlorosilane (Mono) and methyltrichlorosilane (Tri). At least one side reaction occurs during the MCS deactivation phase resulting in higher levels of Tri and other byproducts.
机译：对氯甲烷和硅的“直接过程”进行了广泛的实验室反应动力学研究，通常也称为甲基氯硅烷（MCS）反应。铜，锌和锡的温度和浓度不同。通过提高固定床反应器系统中的温度均匀性，可以提高反应速度的可重复性和可重复性。使用汽提气相色谱仪（GC）烘箱，详细的标准操作程序和小直径固定床反应器可实现良好的温度控制。动力学研究每次运行包含多个采样点，而不是单个采样。使用统计分析工具（SAS，Minitab）分析完整的动力学数据集。假设使用三个硅利用率窗口（0％-15％，15％至30％，30％及更高）来确定反应速率的描述，即所谓的传递函数。所开发的模型支持其中至少存在两个过程的提议。主要反应是MCS反应，生成二甲基二氯硅烷（Di）和等摩尔量的三甲基氯硅烷（Mono）和甲基三氯硅烷（Tri）。在MCS失活阶段至少发生一次副反应，导致更高水平的Tri和其他副产物。

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