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首页> 外文会议>Conference on Silicon Photonics; 20080121-24; San Jose,CA(US) >Circular Grating Resonators as Nano-Photonic Modulators
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Circular Grating Resonators as Nano-Photonic Modulators

机译：圆形光栅谐振器作为纳米光子调制器

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摘要

Circular grating resonators could lead to the development of very advanced silicon-on-insulator (SOI) based nano-photonic devices clearly beyond state of the art in terms of functionality, size, speed, cost, and integration density. The photonic devices based on the circular grating resonators are computationally designed and studied in their functionality using finite-difference time-domain (FDTD) method. A wide variety of critical quantities such as transmission and reflection, resonant modes, resonant frequencies, and field patterns are calculated. Due to their computational size some of these calculations have to be performed on a supercomputer like a massive parallel Blue Gene machine. Using the computational design parameters the devices are fabricated on SOI substrates consisting of a buried oxide layer and a 340-nm-thick device layer. The devices are denned by electron-beam lithography and the pattern transfer is achieved in a inductively coupled reactive-ion etch process. Then the devices are characterized by coupling light in from a tunable laser with a lensed fiber. As predicted the measured transmission spectra exhibit a wide range of different type of resonances with Q-factors over 1000 which compares very well with the computations.
机译：圆形光栅谐振器可以导致非常先进的基于绝缘体上硅（SOI）的纳米光子器件的开发，在功能，尺寸，速度，成本和集成密度方面显然超出了现有技术水平。使用有限差分时域（FDTD）方法对基于圆形光栅谐振器的光子器件进行了功能设计和研究。计算出各种临界量，例如透射和反射，共振模式，共振频率和场模式。由于它们的计算量，其中一些计算必须在超级计算机（如大型并行Blue Gene机器）上执行。使用计算设计参数，可在SOI衬底上制造器件，该SOI衬底由掩埋氧化物层和340 nm厚的器件层组成。通过电子束光刻对器件进行压印，并通过感应耦合的反应离子蚀刻工艺实现图案转移。然后，这些设备的特征是将可调谐激光器发出的光与透镜状光纤耦合。如预测的那样，测得的透射光谱表现出范围广泛的不同类型的共振，其Q因子超过1000，与计算结果相比非常好。

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