An all-silicon channel waveguide fabricated using direct proton beam writing

机译：使用直接质子束写入制造的全硅通道波导

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摘要

We report a novel technique for the fabrication of an all-silicon channel waveguide using direct proton beam writing and subsequent electrochemical etching. A focused beam of high energy protons is used to selectively inhibit porous silicon formation in the irradiated regions. By over-etching beyond the ion range, the irradiated region becomes surrounded by porous silicon cladding. Waveguide characterization carried out at 1550 nm on the proton irradiated waveguide shows that the propagation losses improve significantly from 20+2 dB/cm to 9±2 dB/cm after vacuum annealing at 800℃ for 1 hour.

机译：我们报告了一种使用直接质子束写入和随后的电化学刻蚀制造全硅通道波导的新技术。高能量质子的聚焦束用于选择性地抑制在被照射区域中的多孔硅的形成。通过超过离子范围的过度蚀刻，被照射的区域被多孔硅包层包围。在质子辐照的波导上于1550 nm处进行的波导表征表明，在800℃真空退火1小时后，传输损耗从20 + 2 dB / cm显着提高到9±2 dB / cm。

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来源
《Conference on Silicon Photonics; 20080121-24; San Jose,CA(US)》|2008年|P.ivii|共2页
会议地点 San JoseCA(US)
作者
E. J. Teo; A. A. Bettiol; M. B. H Breese; P. Y. Yang; G. Z. Mashanovich; W. R. Headley; G. T. Reed; D. J. Blackwood;
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作者单位

Centre for Ion Beam Applications, Department of Physics, National University of Singapore, 2 Science Drive 3, Singapore 117542;

Advanced Technology Institute, School of Electronics and Physical Sciences, University of Surrey, GU2 7XH, United Kingdom;

Depar;

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原文格式 PDF
正文语种 eng
中图分类半导体光电器件;
关键词
proton beam writing; silicon photonics; porous silicon; waveguides;

机译：质子束写入;硅光子学;多孔硅;波导;

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1. All-silicon subwavelength structural coloration fabricated through proton beam writing and reactive ion etching [J] . Jintao Gong, Huining Jin, Chengyuan Yang, Nuclear Instruments & Methods in Physics Research . 2020,第Apra15期

机译：通过质子束写入和反应离子刻蚀制备的全硅亚波长结构着色
2. Characterization of channel waveguides and tunable microlasers in SU8 doped with rhodamine B fabricated using proton beam writing [J] . Rao SV, Bettiol AA, Watt F Journal of Physics, D. Applied Physics: A Europhysics Journal . 2008,第19期

机译：质子束写入制备的罗丹明B掺杂SU8中的通道波导和可调谐微激光的表征
3. Erbium-doped waveguide amplifiers fabricated using focused proton beam writing [J] . K. Liu, E. Y. B. Pun, T. C. Sum, Applied Physics Letters . 2004,第5期

机译：使用聚焦质子束写入制造的掺波导放大器
4. An all-silicon channel waveguide fabricated using direct proton beam writing [C] . E. J. Teo, A. A. Bettiol, M. B. H Breese, Conference on Silicon Photonics . 2008

机译：使用直接质子束写入制造的全硅通道波导
5. A study of the laser direct writing for all polymer single mode passive optical channel waveguide devices. [D] . Borden, Bradley W. 2008

机译：对所有聚合物单模无源光通道波导器件进行激光直接写入的研究。
6. Mid-infrared laser emission from Cr:ZnS channel waveguide fabricated by femtosecond laser helical writing [O] . Ya-Pei Peng, Xiao Zou, Zhengyuan Bai, -1

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7. Continuous wave channel waveguide lasers in Nd:LuVO4 fabricated by direct femtosecond laser writing [O] . Ren Yingying, Dong Ningning, Macdonald John, 2012

机译：直接飞秒激光写入制备的Nd：LuVO4连续波通道波导激光器
8. Nanoimprinting of Micro-Optical Components Fabricated using Stamps Made with Proton Beam Writing [R] . van Kan, J. A. , Bettiol, A. A. , Osipowicz, T. , 2006

机译：用质子束写入印章制作微光学元件的纳米压印

An all-silicon channel waveguide fabricated using direct proton beam writing

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