An anodic bond is modeled as a moving nonmaterial line forming the intersection of three material surfaces representing the unbonded conductor, the unbonded insulator, and the bonded interface. The component mass balance equations, Gauss law, and the linear momentum equation are placed in a finite elmeent formulation, which is used to predict the evolution of the sodium ion concentration, electric potnetial, and stress during anodic bonding of Pyrex glass and silicon.
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