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首页> 外文会议>Current developments in lens design and optical engineering XII; and Advances in thin film coatings VII >Linear Systems Formulation of Image Analysis in the Presence of both Aberrations and Surface Scatter
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Linear Systems Formulation of Image Analysis in the Presence of both Aberrations and Surface Scatter

机译：同时存在像差和表面散射的图像分析的线性系统公式

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Image analysis in the presence of surface scatter due to residual optical fabrication errors is often perceived to be complicated, non-intuitive and computationally intensive. The linear systems formulation of surface scatter phenomena has resulted in the development of an angle spread function that is completely analogous to the point spread function in modern image formation theory; i.e., surface scatter can be treated very similar to conventional wavefront aberrations. For multi-element imaging systems degraded by both surface scatter and aberrations, the composite point spread function is obtained in explicit form in terms of convolutions of the geometrical point spread function and the angle spread functions of the individual surfaces of the imaging system. The approximations and assumptions in this formulation are discussed in detail, and the result is compared to the irradiance distribution obtained using commercial software for the case of a two-mirror EUV telescope. The two results are virtually identical.
机译：由于残留光学制造误差而在存在表面散射的情况下进行图像分析通常被认为是复杂，非直观且计算量大的。表面散射现象的线性系统表述导致了角度扩展函数的发展，该角度扩展函数完全类似于现代图像形成理论中的点扩展函数。即，可以将表面散射与常规波前像差非常相似地进行处理。对于由于表面散射和像差而退化的多元素成像系统，根据成像系统各个表面的几何点扩展函数和角度扩展函数的卷积，以明确的形式获得复合点扩展函数。详细讨论了该公式中的近似值和假设，并将结果与​​使用商业软件获得的辐照度分布进行了比较（对于两镜EUV望远镜而言）。这两个结果实际上是相同的。

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