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Thin film photodetectors for the UV and vacuum UV spectral range

机译:用于紫外线和真空紫外线光谱范围的薄膜光电探测器

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Abstract: We present the first semiconductor p-i-n photodiode with excellent sensitivity in the VUV range and high rejection of visible radiation. The device is based on the thin-film technology of amorphous silicon and silicon carbide and can be integrated in large area arrays on glass or flexible substrate. Its internal quantum efficiency is over 50 percent in the VUV and decreases with wavelength. In the visible range the sensitivity can be tuned by variations to the technology parameters. Solar blind photodiodes have been fabricated, with 1 percent quantum efficiency at 400 nm and 0.1 at 650 nm. Working bias voltage is very low since its best sensitivity is achieved when reversely biased with 0.3V. Linearity of the photocurrent was verified with incident UV light in the range 5nW to 4mW. Response times under UV illumination was tested with a N$-2$/ laser: 500 ns rise times and 6$mu@s FWHM were measured. The excellent behavior of the photodetector in the UV range was explained in the UV range was explained within the hypotheses that generation of hot carriers in the p-doped layer occurs and that a pure diffusion mechanism rules transport, being the thickness of the p-doped layer comparable with the effective diffusion length of electrons. !10
机译:摘要:我们提出了第一款半导体P-i-n光电二极管,它在VUV范围内具有出色的灵敏度,并且对可见辐射具有高抑制率。该设备基于非晶硅和碳化硅的薄膜技术,可以集成在玻璃或柔性基板上的大面积阵列中。它的内部量子效率在VUV中超过50%,并随波长而降低。在可见范围内,可以通过更改技术参数来调整灵敏度。已经制造出日盲光电二极管,其在400 nm处的量子效率为1%,在650 nm处的量子效率为0.1。工作偏置电压非常低,因为当以0.3V反向偏置时,其最佳灵敏度得以实现。用入射光在5nW至4mW范围内验证了光电流的线性。用N $ -2 $ /激光器测试了紫外线照射下的响应时间:测量了500 ns的上升时间和6μs的FWHM。在以下假设中解释了光电探测器在紫外线范围内的出色行为:在以下假设中解释了紫外线:在p掺杂层中会产生热载流子,并且纯扩散机制控制着p掺杂的厚度层可与电子的有效扩散长度相媲美。 !10

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