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Opto-micro-mechanical superresolution detector system

机译:光电微机械超分辨率探测器系统

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Abstract: Often the digital resolution of optical systems is limited by the size of the pixels of detector arrays. To increase this lateral resolution an architecture with a new spatial light modulator is presented. A microstripe is moved across a detector. The microstripe shades off a small part of the detector surface thus providing an inverse opto- micromechanical scanning. Additional virtual subpixels are generated. The lateral resolution of the detector increases by the number of lateral shifts, which is experimentally demonstrated up to factor of 30. The concept includes a throughput or multiplex advantage. For enhanced resolution the signal to noise ratio nearly does not decrease in the case of thermal like noise. The microstripe array is prepared by micromachining technology, the thickness of the stripes is 1...2 $mu@m, the width is 3 $mu@m...1 mm and length is up to 2 mm. !11
机译:摘要:通常,光学系统的数字分辨率受到探测器阵列像素大小的限制。为了增加横向分辨率,提出了一种具有新型空间光调制器的架构。一条微条带在检测器上移动。微条带遮盖了检测器表面的一小部分,从而提供了反向的微机械扫描。生成其他虚拟子像素。检测器的横向分辨率会增加横向偏移的数量,这在实验中得到了证明,高达30倍。该概念包括吞吐量或多路复用优势。为了提高分辨率,在像热噪声一样的情况下,信噪比几乎不会降低。微条纹阵列是通过微机械加工技术制备的,条的厚度为1 ...2μm@ m,宽度为3μmμm... 1mm,长度为2mm。 !11

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