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首页> 外文会议>Design for manufacturability through design-process integration IV >DRCPlus in a Router: Automatic Elimination of Lithography Hotspots using 2D Pattern Detection and Correction
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DRCPlus in a Router: Automatic Elimination of Lithography Hotspots using 2D Pattern Detection and Correction

机译：路由器中的DRCPlus：使用2D模式检测和校正自动消除光刻热点

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As technology processes continue to shrink, standard design rule checking (DRC) has become insufficient to guarantee design manufacturability. DRCPlus is a powerful technique for capturing yield detractors related to complex 2D situations. DRCPlus is a pattern-based 2D design rule check beyond traditional width and space DRC that can identify problematic 2D configurations which are difficult to manufacture. This paper describes a new approach for applying DRCPlus in a router, enabling an automated approach to detecting and fixing known lithography hotspots using an integrated fast 2D pattern matching engine. A simple passo-pass criterion associated with each pattern offers designers guidance on how to fix these problematic patterns. Since it does not rely on compute intensive simulations, DRCPlus can be applied on fairly large design blocks and enforced in conjunction with standard DRC in the early stages of the design flow. By embedding this capability into the router, 2D yield detractors can be identified and fixed by designers in a push-button manner without losing design connectivity. More robust designs can be achieved and the impact on parasitics can be easily assessed.rnThis paper will describe a flow using a fast 2D pattern matching engine integrated into the router in order to enforce DRCPlus rules. An integrated approach allows for rapid identification of hotspot patterns and, more importantly, allows for rapid fixing and verification of these hotspots by a tool that understands design intent and constraints. The overall flow is illustrated in Figure 1. An inexact search pattern is passed to the integrated pattern matcher. The match locations are filtered by the router through application of a DRC constraint (typically a recommended rule). Matches that fail this constraint are automatically fixed by the router, with the modified regions incrementally re-checked to ensure no additional DRCPlus violations are introduced.
机译：随着技术流程的不断缩小，标准设计规则检查（DRC）不足以保证设计的可制造性。 DRCPlus是一种用于捕获与复杂2D情况相关的产量下降因素的强大技术。 DRCPlus是超越传统宽度和空间DRC的基于模式的2D设计规则检查，可识别难以制造的有问题的2D配置。本文介绍了一种在路由器中应用DRCPlus的新方法，该方法可以使用集成的快速2D模式匹配引擎以自动方法检测和修复已知的光刻热点。与每个模式相关的简单通过/不通过标准为设计人员提供了有关如何解决这些有问题的模式的指南。由于它不依赖于计算密集型仿真，因此DRCPlus可以应用于相当大的设计模块，并可以在设计流程的早期与标准DRC一起实施。通过将此功能嵌入到路由器中，设计人员可以通过按钮式方式识别和修复2D产量下降因素，而不会失去设计的连通性。可以实现更强大的设计，并且可以轻松评估对寄生虫的影响。本文将描述一种使用集成到路由器中的快速2D模式匹配引擎来执行DRCPlus规则的流程。集成的方法可以快速识别热点模式，更重要的是，可以通过了解设计意图和约束的工具来快速修复和验证这些热点。总体流程如图1所示。一个不精确的搜索模式被传递给集成模式匹配器。路由器通过应用DRC约束（通常是推荐的规则）来过滤匹配位置。超出此限制条件的匹配项将由路由器自动修复，并逐步检查修改后的区域，以确保不引入其他DRCPlus违例。

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