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Application of gray-scale LDW-glass masks for fabrication ofhigh-efficiency DOEs,

机译:灰阶LDW玻璃掩模在制造高效DOE中的应用,

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Abstract: The perspective opportunity to fabricate gray-scale masks was given LDW-glasses (LDW - Laser Direct Writing) from Canyon Materials, Inc. LDW-glass blanks contain a large number density of coloring specks of silver in a surface glass layer. A focused laser beam is used to heat erase these coloring specks. Experiments on the influence of laser radiation on LDW-glasses was carried out using a circular laser writing system. The transmittance value from the blank of 0.1 - 5% up to 70 - 80% depending on laser beam power is obtained with the current write scheme. Results of research of LDW-glasses behavior in a wide range of laser beam scanning speeds are described. Laser pattern generation in LDW-glass including the spatial resolution is discussed. The technology of fabrication of continuous-phase diffractive elements was tested by making exemplary Fresnel lenses. Total 80% efficiency for quartz Fresnel lenses with minimal zone width of 8 $mu@m was readily achieved in the preliminary experiments.!13
机译:摘要:Canyon Materials,Inc.的LDW玻璃(LDW-激光直接书写)为制造灰度级掩模提供了机会。LDW玻璃毛坯在表面玻璃层中包含大量的银色斑点。聚焦的激光束用于加热消除这些色斑。使用圆形激光写入系统进行了激光辐射对LDW玻璃的影响的实验。使用当前的写入方案,可以获得从空白处的透射率值(从0.1%到5%)到70-80%(取决于激光束功率)。描述了在各种激光束扫描速度下LDW玻璃行为的研究结果。讨论了包括空间分辨率在内的LDW玻璃的激光图案生成。通过制造示例性菲涅耳透镜来测试连续相衍射元件的制造技术。在初步实验中很容易获得石英菲涅耳透镜的总效率80%,最小区域宽度为8μm@m。13

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