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首页> 外文会议>DSC-vol.73-1; American Society of Mechanical Engineers(ASME) International Mechanical Engineering Congress and Exposition pt.A; 20041113-19; Anaheim,CA(US) >ADAPTIVE CONTROL OF MEMS MIRRORS FOR BEAM STEERING
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ADAPTIVE CONTROL OF MEMS MIRRORS FOR BEAM STEERING

机译：波束转向的MEMS反射镜的自适应控制

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摘要

This paper presents the design and experimental implementation of an adaptive inverse control system for a two axis MEMS tilting mirror used for optical beam steering. The theoretical issues and practical design considerations involved in this task are discussed in detail. The first topic addressed is the system identification of input-output and state-space models of the MEMS mirror. Consistency among the following two system identification methods is verified: identification of a parameterized transfer function and identification of a state-space model by a subspace method. Next, a stabilizing feedback controller and an adaptive inverse control scheme based on an adaptive inverse QR recursive least-squares filter are developed. Finally, the experimental implementation of the control loops is described and the performance of the beam steering system is analyzed.
机译：本文介绍了用于光束转向的两轴MEMS倾斜镜的自适应逆控制系统的设计和实验实现。详细讨论了此任务中涉及的理论问题和实际设计注意事项。解决的第一个主题是MEMS反射镜的输入输出和状态空间模型的系统识别。验证了以下两种系统识别方法之间的一致性：参数化传递函数的识别和子空间方法的状态空间模型的识别。接下来，开发了基于自适应逆QR递归最小二乘滤波器的稳定反馈控制器和自适应逆控制方案。最后，描述了控制回路的实验实现，并分析了光束转向系统的性能。

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