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首页> 外文会议>DSC-vol.73-2; American Society of Mechanical Engineers(ASME) International Mechanical Engineering Congress and Exposition pt.B; 20041113-19; Anaheim,CA(US) >FEEDBACK CONTROL OF ATHERMOMECHANICAL INPLANE MICROACTUATOR USING PIEZORESISTIVE DISPLACEMENT SENSING
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FEEDBACK CONTROL OF ATHERMOMECHANICAL INPLANE MICROACTUATOR USING PIEZORESISTIVE DISPLACEMENT SENSING

机译：基于热阻位移传感的热机械平面微致动器反馈控制

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摘要

Feedback control has proven useful in improving reliability and performance for a variety of systems. However there has been limited success implementing feedback control on surface micromachined MEMS devices. The inherent difficulties in sensing microscale phenomena complicate the development of an economical transducer that can accurately monitor the states of a surface micromachined system. We have demonstrated a simple and effective sensing strategy that uses the piezoresistive property of the polysilicon thin film of which surface micromachined MEMS devices are fabricated. The states of the device are monitored by measuring the change in resistance of flexible members which deflect as the device moves. Measurement of the output displacement of an in-plane thermal actuator is presented as a candidate application. While there still is a noise issue to be dealt with, this approach provides adequate signal strength to implement feedback control using off-chip analog circuitry. Implementation of proportional/integral control on the system is successfully demonstrated.
机译：事实证明，反馈控制对于提高各种系统的可靠性和性能很有用。然而，在表面微机械MEMS器件上实现反馈控制的成功有限。感测微观现象的固有困难使经济型换能器的开发变得复杂，该换能器可以精确地监视表面微加工系统的状态。我们已经证明了一种简单有效的传感策略，该策略利用了制造了表面微加工MEMS器件的多晶硅薄膜的压阻特性。通过测量挠性构件的电阻变化来监视装置的状态，该挠性构件随着装置移动而挠曲。平面内热致动器的输出位移的测量作为候选应用。尽管仍然存在噪声问题需要解决，但是这种方法提供了足够的信号强度，可以使用片外模拟电路来实现反馈控制。成功演示了在系统上执行比例/积分控制。

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