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Parylene C-based flexible interface for neuroprosthetic applications

机译：基于Parylene C的灵活接口，适用于神经修复应用

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Microfabricated microelectrode arrays are used to record and stimulate neurons and nerve axons in the central and peripheral nervous systems. Advances in silicon micromachining have brought forth new configurations of microelectrode structures, such as the Utah Electrode Array (UEA). This paper presents a novel monolithic integration technology to realize a flexible neural interface in which a biocompatible polymer (Parylene-C) mechanically connects the UEA and a100-channel implantable connector system (ICS-96). An integration concept for such a device was developed, and the materials and methods used to implement this concept were investigated. Thin film metal (Au) provides the electrical connection between the UEA and the ICS-96. Au metal traces are sandwiched between the Parylene-C layers. The vapor phase, room temperature polymerization of Parylene lends itself well to constructing extremely thin, flexible and pin-hole free polymer films free of additives.
机译：微型微电极阵列用于记录和刺激中枢神经系统和周围神经系统的神经元和神经轴突。硅微加工技术的进步带来了微电极结构的新配置，例如犹他州电极阵列（UEA）。本文提出了一种新颖的整体集成技术，以实现灵活的神经接口，其中生物相容性聚合物（Parylene-C）机械连接UEA和100​​通道可植入连接器系统（ICS-96）。开发了这种设备的集成概念，并研究了用于实现该概念的材料和方法。薄膜金属（Au）提供UEA与ICS-96之间的电连接。金金属痕迹夹在聚对二甲苯-C层之间。聚对二甲苯的气相，室温聚合非常适合于构建不含添加剂的极薄，柔软且无针孔的聚合物薄膜。

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