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Fabrication of Ultra-Sensitive Carbon Nanotube Field-Effect Sensors (CNTFES) for Biomedical Applications

机译:用于生物医学应用的超灵敏碳纳米管场效应传感器(CNTFES)的制造

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摘要

In this paper we propose a novel method for the realization of carbon nanotube field-effect sensors (CNTFESs) which will most likely have a strong impact on the next-generation of sensors. CNTFESs are ideally suitable for biomedical sensor applications due to their excellent inherent properties such as ultra small size, high specific surface area and extremely high sensitivity. CNTFESs are based on carbon nanotube field-effect transistors (CNTFETs) which are optimized for sensor applications. We have succeeded to develop a simple, reproducible fabrication process to grow individual single-walled carbon nanotubes (SWNTs) and SWNT-networks directly within the specified device area. No tedious manual manipulation and alignment of the SWNTs is necessary. Electrical results of the fabricated fully functional CNTFETs are presented and the use of these devices as SWNT-based field-effect controlled sensors for virus detection is discussed.
机译:在本文中,我们提出了一种用于实现碳纳米管场效应传感器(CNTFES)的新颖方法,该方法很可能会对下一代传感器产生重大影响。 CNTFES具有出色的固有特性,例如超小尺寸,高比表面积和极高的灵敏度,因此非常适合生物医学传感器应用。 CNTFES基于针对传感器应用进行了优化的碳纳米管场效应晶体管(CNTFET)。我们已经成功开发了一种简单,可复制的制造工艺,可以在指定的器件区域内直接生长单个单壁碳纳米管(SWNT)和SWNT网络。不需要繁琐的手动操作和对齐SWNT。介绍了所制造的全功能CNTFET的电学结果,并讨论了将这些器件用作基于SWNT的场效应控制传感器进行病毒检测的用途。

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  • 来源
  • 会议地点 PhoenixAZ(US);PhoenixAZ(US)
  • 作者

    Udo Schwalke; Lorraine Rispal;

  • 作者单位

    Institute for Semiconductor Technology and Nanolectronics, Darmstadt University of Technology, Schlossgartenstrasse 8, 64289 Darmstadt, Germany;

    Institute for Semiconductor Technology and Nanolectronics, Darmstadt University of Technology, Schlossgartenstrasse 8, 64289 Darmstadt, Germany;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类 表面处理;
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