Fabrication of ultrathin Bragg beam splitter by plasma chemical vaporization machining

著录项

• 来源
  《Emerging technology in precision engineering XIV》|2012年|40-45|共6页
• 会议地点 Hyogo(JP);Hyogo(JP)
• 作者

  T. Osaka; M. Yabashi; Y. Sano; K. Tono; Y. lnubushi; T. Sato; S. Matsuyama; T. Ishikawa; Yamauchi;

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• 作者单位

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan;

  RIKEN/SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan;

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan;

  Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198, Japan;

  RIKEN/SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan;

  RIKEN/SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan;

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan;

  RIKEN/SPring-8 Center, 1-1-1 Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5148, Japan;

  Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1, Yamada-oka, Suita, Osaka 565-0871, Japan,Reseach Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

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• 会议组织
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  bragg reflection; bragg beam splitter; X-ray free-electron laser; plasma chemical vaporization machining; topography; rocking curve; X-ray pump-X-ray probe experiment;

  机译：布拉格反射布拉格分束器X射线自由电子激光器；等离子化学汽化加工；地形;摇摆曲线X射线泵-X射线探头实验;