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首页> 外文会议>Emerging technology in precision engineering XIV >Form Error Characterization of Reflective-type Gratings
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Form Error Characterization of Reflective-type Gratings

机译：反射型光栅的形状误差表征

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摘要

A form error characterization of a reflective-type scale grating, which is used in three-degree-of-freedom (3-DOF) encoders for position measurement of a planar motion stage, is presented. The scale grating has a micro-structured surface, the pitch of which is 1 μm in both X-and Y- direction. The periodic pattern on the scale grating generates diffracted beams when a laser beam incidents to the grating surface. The ±1st order diffracted beams from the grating contain information about the stage motions of not only X- or Y- directional in-plane displacement but also Z-directional out-of-plane displacement, and are therefore able to be utilized for multi-axis position detection. Accuracies of the position detection are mainly determined by a period deviation and a Z-directional out-of-flatness of the scale grating. The form error characterization of the grating is possible by using Fizeau interferometer, although the form error of a reference mirror in the Fizeau interferometer still remains as a measurement error in the form of the measured scale grating. In this paper, a new method was proposed to evaluate the form error characterization of the scale grating for the 3-DOF encoder, while eliminating the form error of the reference mirror in the Fizeau interferometer.
机译：提出了一种反射型光栅尺的形状误差特征，该光栅尺用于三自由度（3-DOF）编码器中，用于平面运动平台的位置测量。标尺光栅具有微结构化的表面，其在X和Y方向上的间距均为1μm。当激光束入射到光栅表面时，光栅尺上的周期性图案会产生衍射光束。来自光栅的±1阶衍射光束不仅包含有关X或Y方向平面内位移的载物台运动的信息，而且还包含Z方向平面外位移的载物台运动的信息，因此可以用于多方向轴位置检测。位置检测的精度主要由刻度光栅的周期偏差和Z方向不平坦度决定。通过使用Fizeau干涉仪可以对光栅的形状误差进行表征，尽管Fizeau干涉仪中的参考镜的形状误差仍然作为测量误差以被测量的光栅尺的形式保留。本文提出了一种新的方法来评估3-DOF编码器的光栅尺的形式误差特性，同时消除了Fizeau干涉仪中参考镜的形式误差。

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  • 来源
  • 会议地点 Hyogo(JP);Hyogo(JP)
  • 作者

    Yuki Shimizu; WooJae Kim; So lto; Wei Gao;

  • 作者单位

    Nano-Metrology and Control Lab, Department of Nanomechanics, School of Engineering, Tohoku University, Japan;

    Nano-Metrology and Control Lab, Department of Nanomechanics, School of Engineering, Tohoku University, Japan;

    Nano-Metrology and Control Lab, Department of Nanomechanics, School of Engineering, Tohoku University, Japan;

    Nano-Metrology and Control Lab, Department of Nanomechanics, School of Engineering, Tohoku University, Japan;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    scale grating; linear encoder; out-of-flatness; interferometer; period deviation;

    机译：光栅尺线性编码器不平整干涉仪周期偏差;

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