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首页> 外文会议>Emerging technology in precision engineering XIV >Sphericity Measurement Using Stitching Interferometry
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Sphericity Measurement Using Stitching Interferometry

机译：使用拼接干涉法测量球度

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摘要

A newly developed practical sphericity measurement system by means of stitching interferometry is described in this paper. Spheres are widely used in industry. In particular, spheres with stem are usually used in metrological applications such as reference sphere for Coordinate Measuring Machines. It is common to calibrate form of spheres with tactile roundness measurement, however a comprehensive form measurement is desired for evolving high precision applications. The developed system consists of commercial base Fizeau type interferometer to capture partial surface areas of sphere and five axes stages to handle sphere with stem. Hence the system is very suitable for measurement of such stemmed spheres. This system yields three dimensional form maps of stitched sphere and peak to valley sphericity. Standard deviation of sphericity value yielded using this system is less than 5 nm in 8 times repetition. Finally, an equatorial profile clipped from stitched sphere shows good agreement with a result of tactile roundness measuring method within 10 nm typically.
机译：本文介绍了一种通过缝线干涉法开发的实用球形度测量系统。球体广泛用于工业中。特别是，带有杆的球通常用于计量应用，例如坐标测量机的参考球。通常用触觉圆度测量来校准球体的形状，但是，对于不断发展的高精度应用，需要一种全面的形状测量方法。开发的系统由商业基础的Fizeau型干涉仪组成，用于捕获球的部分表面积，并具有五轴位移台以处理带有杆的球。因此，该系统非常适合于此类茎球的测量。该系统生成了缝合球体和峰到谷球形度的三维形式图。使用此系统产生的球形度值的标准偏差在8次重复中小于5 nm。最后，从缝合球上截取的赤道轮廓与通常在10 nm内的触感圆度测量方法的结果显示出良好的一致性。

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