Improvement of an air-bearing displacement sensor with nanometric resolution

机译：纳米分辨率气浮位移传感器的改进

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摘要

A contact stylus-type displacement sensor is proposed for a surface form measurement of micro-structures. The stylus is supported by an air-bearing, thus it can be moved smoothly without friction between the stylus and the air-bearing. In order to reduce the measurement force, a novel controlling technique of a contact force has been developed. During the measurement one edge of the stylus is maintained contact with the measured surface by its own weight. Another end of the stylus is connected with a counter weight by a string and the stylus is hanging on the string in order to reduce the contact force between the edge of the stylus and the measured surface. Measuring force is estimated to confirm the effectiveness of the counter weight. Surface measurement of a steel ball is carried out using the developed air-bearing displacement sensor.

机译：提出了一种触笔式位移传感器，用于微观结构的表面形状测量。触控笔由气垫支撑，因此可以在触控笔和气垫之间无摩擦的情况下平稳移动。为了减小测量力，已经开发了新颖的接触力控制技术。在测量过程中，触控笔的一个边缘通过其自重保持与被测表面的接触。测针的另一端通过一根细绳与配重连接，并且测针悬挂在细绳上，以减小测针边缘与被测表面之间的接触力。估计测量力以确认配重的有效性。钢球的表面测量使用开发的空气轴承位移传感器进行。

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来源
《Emerging technology in precision engineering XIV》|2012年|945-950|共6页
会议地点 Hyogo(JP);Hyogo(JP)
作者
So Ito; Kang-Won Lee; Yuki Shimizu; Wei Gao;
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作者单位

6-6-01, Aramaki, Aoba-ku, Sendai, Miyagi, Japan Department of Nanomechanics, Tohoku University;

6-6-01, Aramaki, Aoba-ku, Sendai, Miyagi, Japan Department of Nanomechanics, Tohoku University;

6-6-01, Aramaki, Aoba-ku, Sendai, Miyagi, Japan Department of Nanomechanics, Tohoku University;

6-6-01, Aramaki, Aoba-ku, Sendai, Miyagi, Japan Department of Nanomechanics, Tohoku University;

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原文格式 PDF
正文语种 eng
中图分类
关键词
air-bearing displacement sensor; surface profile measurement; low loading measurement; on-machine measurement;

机译：空气轴承位移传感器；表面轮廓测量；低负荷测量；机上测量;

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专利

1. A Three-axis Displacement Sensor with Nanometric Resolution [J] . W. Gao, A. Kimura CIRP Annals . 2007,第1期

机译：具有纳米分辨率的三轴位移传感器
2. Experimental investigation of an air-bearing displacement sensor for on-machine surface form measurement of micro-structures [J] . Kang-Won Lee, Young-Jin Noh, Wei Gao, International Journal of Precision Engineering and Manufacturing . 2011,第4期

机译：含气位移传感器用于微结构在机表面形状测量的实验研究
3. Experimental Investigation of an Air-bearing Displacement Sensor for On-machine Surface Form Measurement of Micro-structures [J] . Kang-Won Lee, Young-Jin Noh, Wei Gao, International Journal of Precision Engineering and Manufacturing . 2011,第4期

机译：含气位移传感器用于微结构在机表面形状测量的实验研究
4. Improvement of an air-bearing displacement sensor with nanometric resolution [C] . So Ito, Kang-Won Lee, Yuki Shimizu International Conference on Precision Engineering . 2012

机译：具有纳米分辨率的空气载位传感器的改进
5. Design and validation of a laser-interferometry-based displacement sensor with nanometer resolution. [D] . Han, Yufeng. 2005

机译：具有纳米分辨率的基于激光干涉测量的位移传感器的设计和验证。
6. Design Optimization and Improvement of FBG Flexible Sensor for Slope Displacement Profiles Measurement [O] . Changbin Tian, Zhengfang Wang, Qingmei Sui, 2019

机译：FBG挠性位移测量柔性传感器的设计优化与改进
7. Sub-λ/2 Displacement Sensor With Nanometric Precision Based on Optical Feedback Interferometry Used as a Non-Uniform Event-Based Sampling System [O] . Olivier D. Bernal, Usman Zabit, Francis Jayat, 2020

机译：基于光学反馈干涉测量的纳米精度用作非均匀事件的采样系统，子λ/ 2位移传感器
8. Submicron resolution monolithic capacitive displacement sensor with digital output. Final report. [R] . W. Current P. S. Chau 1990

机译：亚微米分辨率单片电容式位移传感器，带数字输出。总结报告。

Improvement of an air-bearing displacement sensor with nanometric resolution

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