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首页> 外文会议>Emerging technology in precision engineering XIV >Improvement of interface roughness in platinum/carbon multilayers for X-ray mirrors
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Improvement of interface roughness in platinum/carbon multilayers for X-ray mirrors

机译：改善X射线镜的铂/碳多层膜的界面粗糙度

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摘要

We present a study of the improvement in interface roughness of platinum/carbon multilayers for X-ray mirrors. The X-ray reflectivity of multilayers strongly depends on interface quality. In an effort to reduce the interface roughness caused by crystallization during deposition, carbon doping of platinum was proposed, and its effectiveness was evaluated. We compared 45-nm-thick single-layer platinum to carbon-doped platinum films. The films were deposited on a silicon (100) substrate by dc magnetron sputtering deposition. The surface roughness and X-ray diffraction spectrum of each film were measured by atomic force microscopy and X-ray diffraction, respectively. We concluded that the increase in carbon concentration suppresses the crystallization of platinum and causes the surface roughness to decrease.
机译：我们目前对X射线镜的铂/碳多层膜界面粗糙度的改善进行了研究。多层的X射线反射率在很大程度上取决于界面质量。为了减少由沉积过程中的结晶引起的界面粗糙度，提出了铂的碳掺杂，并评价了其有效性。我们将45纳米厚的单层铂与碳掺杂的铂薄膜进行了比较。通过直流磁控溅射沉积将膜沉积在硅（100）衬底上。通过原子力显微镜和X射线衍射分别测量每个膜的表面粗糙度和X射线衍射光谱。我们得出的结论是，碳浓度的增加会抑制铂的结晶，并使表面粗糙度降低。

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  • 来源
  • 会议地点 Hyogo(JP);Hyogo(JP)
  • 作者

    Jangwoo Kim; Satoshi Matsuyama; Yasuhisa Sano; Kazuto Yamauchi;

  • 作者单位

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan,Japan Science and Technology Agency, CREST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

    Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan,Japan Science and Technology Agency, CREST, 4-1-8 Honcho, Kawaguchi, Saitama 332-0012, Japan,Research Center for Ultra-Precision Science and Technology, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871, Japan;

  • 会议组织
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    interface roughness; hard X-ray mirrors; multilayers; X-ray reflectivity;

    机译：界面粗糙度硬X射线镜；多层X射线反射率;

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