SILANE SAFETY IN AMORPHOUS SILICON AND SILICON NITRIDE OPERATIONS

机译：非晶硅和氮化硅操作中的硅烷安全

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The PV industry is one of the fastest growing industries in Europe, the United States, and Japan. As PV manufacturing is scaled-up to meet a growing demand, preserving the safe, environmentally friendly nature of the industry becomes even more important. Silane is one of the inherently dangerous materials used in the deposition of silicon nitride (SiN_3) and amorphous silicon (a-Si). In this paper, we review established methods for using this gas safely; they include risk-prevention strategies, passive and active protection systems, outdoor storage, and adequate buffer zones for bulk-silane installations.

机译：光伏产业是欧洲，美国和日本发展最快的产业之一。随着光伏制造规模的扩大以满足不断增长的需求，保持行业安全，环保的性质变得更加重要。硅烷是用于沉积氮化硅（SiN_3）和非晶硅（a-Si）的固有危险材料之一。在本文中，我们回顾了安全使用这种气体的既定方法。它们包括预防风险的策略，被动和主动保护系统，室外存储以及用于批量硅烷安装的足够缓冲区。

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来源
《European Photovoltaic Solar Energy Conference; 20060904-08; Dresden(DE)》|2006年|P.1761-1763|共3页
会议地点 Dresden(DE)
作者
Vasilis Fthenakis; Chip Carlisle; Waikei Chan;
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作者单位

National Photovoltaic Environmental Health and Safety Research Center, Brookhaven National Laboratory, Upton, NY 11973;

United Solar Ovonic, Auburn Hills, MI 48346;

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会议组织
原文格式 PDF
正文语种 eng
中图分类太阳能技术;
关键词
silane; hazards; safety; photovoltaics; risks;

机译：硅烷;危害;安全性;光伏;风险;

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专利

1. Optical properties of amorphous silicon nitride thin-films prepared by VHF-PECVD using silane and nitrogen [J] . Wee Chong Tan, S. Kobayashi, T. Aoki, Journal of materials science . 2009,第suppla期

机译：使用硅烷和氮气通过VHF-PECVD制备的非晶氮化硅薄膜的光学性质
2. Damage-free laser patterning of silicon nitride on textured crystalline silicon using an amorphous silicon etch mask for Ni/Cu plated silicon solar cells [J] . Bailly Mark S., Karas Joseph, Jain Harsh, Thin Solid Films . 2016,第AUGa1期

机译：使用非晶硅蚀刻掩模对镀镍/铜的硅太阳能电池在纹理化晶体硅上进行氮化硅的无损激光图案
3. Preparation of fibre-like silicon nitride from amorphous silicon nitride powder [J] . Ch. Kawai, A. Yamakawa Journal of Materials Science Letters . 1995,第3期

机译：由非晶态氮化硅粉末制备纤维状氮化硅
4. SILANE SAFETY IN AMORPHOUS SILICON AND SILICON NITRIDE OPERATIONS [C] . Vasilis Fthenakis, Chip Carlisle, Waikei Chan European Photovoltaic Solar Energy Conference . 2006

机译：非晶硅和氮化硅操作中的硅烷安全
5. A magnetic resonance investigation of trivalent silicon centers in amorphous silicon dioxide and amorphous silicon nitride. [D] . Warren, William Leo. 1990

机译：非晶态二氧化硅和非晶态氮化硅中三价硅中心的磁共振研究。
6. Effect of Thermal Annealing on the Photoluminescence of Dense Si Nanodots Embedded in Amorphous Silicon Nitride Films [O] . Qianqian Liu, Xiaoxuan Chen, Hongliang Li, 2021

机译：热退火对非晶硅氮化硅膜嵌入浓度的致密Si纳米蛋白光致发光的影响
7. Thermodynamic Calculations on the Chemical Vapor Deposition of Silicon Nitride and Silicon from Silane and Chlorinated Silanes [O] . Frank Einar Kruis, Brian Scarlett, Robert A. Bauer, 1992

机译：硅烷和氯化硅烷氮化硅和硅化学气相沉积的热力学计算
8. Enhanced Growth Rate and Silane Utilization in Amorphous Silicon and Nanocrystalline-Silicon Solar Cell Deposition via Gas Phase Additives. [R] . Ridgeway, R. G., Daub, G. H., Martinez, D., 2012

机译：通过气相添加剂在非晶硅和纳米晶硅太阳能电池沉积中提高生长速率和硅烷利用率。

SILANE SAFETY IN AMORPHOUS SILICON AND SILICON NITRIDE OPERATIONS

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