• 主题
高级搜索  >
历史搜索 清空历史
首页> 外文会议>European Photovoltaic Solar Energy Conference; 20060904-08; Dresden(DE) >INFLUENCE OF THE PLASMA IGNITION CONDITIONS ON THE PERFORMANCE OF MICROCRYSTALLINE SILICON P-I-N SOLAR CELLS
【24h】

INFLUENCE OF THE PLASMA IGNITION CONDITIONS ON THE PERFORMANCE OF MICROCRYSTALLINE SILICON P-I-N SOLAR CELLS

机译：等离子体点火条件对微晶硅P-I-N太阳能电池性能的影响

获取原文
获取原文并翻译 | 示例
页面导航
  • 摘要
  • 著录项
  • 相似文献
  • 相关主题

摘要

The influence of the initial i-layer deposition condition on the performance of microcrystalline silicon solar cells has been studied. Solar cells have been made with different silane concentrations (SC) during the i-layer deposition. Different plasma stabilization times have been applied during which a shutter is preventing deposition to the substrate. The plasma stabilization time appears to be critical for the cell performance. Variation of this plasma stabilization time shifts the transition from microcrystalline to amorphous growth conditions to different SC values. The use of a shutter makes it possible to reduce the influence of the initial surplus of effective SC in the plasma zone. Therefore it is possible to choose the source gas SC closer to the optimum for the stabilized condition, without suffering from amorphous growth in the initial period. The effects are correlated to the changes in plasma emission intensities of specific silane and hydrogen related plasma lines that occur during the first minutes after plasma ignition. These transients have earlier been studied and modeled for a reactor with shower head gas flow geometry. For this study, the model is adapted for the cross-flow geometry and it supports the experimental observations.
机译：研究了初始i层沉积条件对微晶硅太阳能电池性能的影响。在i层沉积过程中，太阳能电池的硅烷浓度（SC）不同。已经应用了不同的等离子体稳定时间，在此期间快门阻止沉积到基板上。等离子体稳定时间似乎对电池性能至关重要。该等离子体稳定时间的变化将从微晶到无定形生长条件的转变转变为不同的SC值。百叶窗的使用使得可以减小等离子区中有效SC的初始剩余的影响。因此，可以选择更接近于稳定状态的最佳状态的原料气体SC，而不会在初期遭受非晶质的生长。该效应与在等离子体点火后的第一分钟内发生的特定硅烷和与氢有关的等离子体线的等离子体发射强度的变化相关。对于具有喷头气流几何形状的反应堆，已经对这些瞬态进行了较早的研究和建模。对于本研究，该模型适用于错流几何形状，并支持实验观察。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱：kefu@zhangqiaokeyan.com

京公网安备：11010802029741号 ICP备案号：京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有

  • 客服微信

  • 服务号