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首页> 外文会议>European Photovoltaic Solar Energy Conference; 20060904-08; Dresden(DE) >DEPOSITION PRESSURE EFFECTS ON THE PERFORMANCE OF MICROMORPH TANDEM SOLAR CELLS GROWN BY VHF-PECVD
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DEPOSITION PRESSURE EFFECTS ON THE PERFORMANCE OF MICROMORPH TANDEM SOLAR CELLS GROWN BY VHF-PECVD

机译：沉积压力对VHF-PECVD生长的显微串联太阳能电池性能的影响

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摘要

Micromorph" tandem solar cells consisting of an amorphous silicon top cell and a microcrystalline silicon bottom cell represent an elegant way of overcoming the efficiency limits of single-junction solar cells and reducing the light induced degradation of amorphous silicon films. These devices allow a good utilization of the solar spectrum due to the bandgap values of the two materials. In this work micromorph tandem solar cells have been realized on Asahi U-type TCO-covered glass substrates. The intrinsic layer of both the amorphous top cell and the microcrystalline bottom cell are grown by VHF-PECVD at 100MHz at low substrate temperature (150 ℃). For the bottom cell, low pressure-low power and high pressure-high power regimes have been explored aiming at growing high quality microcrystalline silicon at large deposition rates. The effect of the structural composition of the microcrystalline absorber layer on tandem device performance has been investigated. A preliminary evaluation of device stability has been done by exposing the tandem solar cells to white light for 200 hours. An initial efficiency of 11.3 % has been obtained.
机译：由非晶硅顶部电池和微晶硅底部电池组成的“ Micromorph”串联太阳能电池代表了一种克服单结太阳能电池效率极限并减少光诱导的非晶硅膜降解的绝佳方法。这些器件可实现良好的利用由于这两种材料的带隙值导致太阳光谱的变化，在这项工作中，在旭U型TCO覆盖的玻璃基板上实现了微晶串联太阳能电池，非晶顶部电池和微晶底部电池的本征层均为通过VHF-PECVD在较低的衬底温度（150℃）下以100MHz生长，对于底部电池，已经探索了低压-低功率和高压-高功率方案，旨在以大沉积速率生长高质量的微晶硅。研究了微晶吸收层的结构组成对串联器件性能的影响。通过将串联太阳能电池暴露在白光下200小时来实现设备稳定性。初始效率为11.3％。

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