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首页> 外文会议>EuSPEN(European Society for Precision Engineering and Nanotechnology) International Conference; 20040531-0602; Glasgow(GB) >Ultrasonic assisted lapping of complex microstructures using chemically active slurries
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Ultrasonic assisted lapping of complex microstructures using chemically active slurries

机译：使用化学活性浆料对复杂的微结构进行超声辅助研磨

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摘要

High quality patterned surfaces mostly with complex microstructures are key functional components for micro electrical, fluidic, optical, biomedical and chemical devices. Processes and technologies for cost-effectively machining these patterned surfaces to the required quality and accuracy remain far from well established. The improved micro ultrasonic assisted lapping (micro-USAL) technique, proposed by the researchers at LFM of Bremen University, has shown a high flexibility in creating a number of complex microstructures (e.g. spiral) on brittle materials with feature sizes from 50 to 500 microns. Recent surface quality inspection has further disclosed that during the micro-USAL with hard abrasive particles rather coarse surface roughness can be attributed to its crack-based material removal mechanism. Reducing abrasive size and using same-sized alumina instead of diamond slurry can produce a better surface, while vibration amplitude only has a slight effect on the roughness. As a more effective way to reduce the surface roughness, introducing chemically active slurry into the micro-USAL can create mirror-like surfaces with the roughness Ra of less than 10nm.
机译：大多数具有复杂微结构的高质量图案化表面是微电子，流体，光学，生物医学和化学设备的关键功能组件。成本有效地将这些图案化表面加工成所需质量和精度的工艺和技术还远远没有建立。不来梅大学LFM的研究人员提出了一种改进的微超声辅助研磨（micro-USAL）技术，该技术在特征尺寸为50至500微米的脆性材料上创建许多复杂的微结构（例如螺旋形）方面显示出很高的灵活性。 。最近的表面质量检查进一步公开了在具有坚硬磨料颗粒的微型USAL期间，相当粗糙的表面粗糙度可归因于其基于裂纹的材料去除机制。减小磨料尺寸并使用相同尺寸的氧化铝代替金刚石浆料可以产生更好的表面，而振动幅度对粗糙度的影响很小。作为降低表面粗糙度的更有效方法，将化学活性浆料引入微型USAL可以创建粗糙度Ra小于10nm的镜面状表面。

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