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首页> 外文会议>EuSPEN(European Society for Precision Engineering and Nanotechnology) International Conference; 20040531-0602; Glasgow(GB) >The design of a co-ordinate measuring probe for characterising truly three-dimensional micro-structures
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The design of a co-ordinate measuring probe for characterising truly three-dimensional micro-structures

机译：用于表征真正的三维微观结构的坐标测量探头的设计

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摘要

This paper describes research towards developing a probe that can measure the spatial co-ordinates of tiny three-dimensional features on small objects. Most commercial instruments purporting to measure dimensions of micrometre-sized features are essentially extended surface texture measuring instruments. They usually have limited range in at least one axis. The probe described here can measure truly three-dimensional features of high aspect ratio, for example deep trenches, sidewalls and nozzles. The design and construction of a prototype probe with a spherically-tipped stylus of 50 μm diameter and several hundred micrometres long, is discussed in the paper and results are given for measurements of tiny micro-holes.
机译：本文描述了有关开发一种探针的研究，该探针可以测量小物体上微小的三维特征的空间坐标。大多数旨在测量微米级特征尺寸的商用仪器本质上都是扩展的表面纹理测量仪器。它们通常在至少一个轴上具有有限的范围。这里描述的探针可以测量高深宽比的真正三维特征，例如深沟槽，侧壁和喷嘴。本文讨论了原型探针的设计和构造，该探针具有50μm直径，几百微米长的球形探针，并给出了测量微小孔的结果。

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