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首页> 外文会议>EUV and X-ray optics: Synergy between laboratory and space II >Time resolved EUV pump-probe microscopy of fs-LASER induced nanostructure formation
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Time resolved EUV pump-probe microscopy of fs-LASER induced nanostructure formation

机译：fs-LASER诱导的纳米结构形成的时间分辨EUV泵浦探针显微镜

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摘要

We report on our efforts in design and construction of a compact Extreme Ultraviolet (EUV)-pump-probe microscope. The goal is the observation of formation of nanostructures, induced by a femtosecond (fs)-laser pulse. The unique interaction processes of fs-laser radiation with matter open up new markets in laser material processing and, therefore, are actively investigated in the last decade. The resulting "sub 100 nm"-structures offer vast potential benefits in photonics, biotechnology, tribological surface design, plasmonic applications and production of nanoparticles. Focused fs-laser radiation causes a local modification resulting in nanostructures of high precision and reproducibility. However the formation dynamics is not well understood. Research in this field requires high temporal and spatial resolution. A combination of fs-laser and EUV-microscope provides a tool for "in situ"-observation of the formation dynamics. As exemplary structures to be investigated, we use nanojets on thin gold films and periodic surface structures (ripples) on dielectrics. In the future, the EUV-pump-probe microscope can become a versatile tool to observe physical or biological processes. Microscopy using EUV-light is capable of detecting structures on a scale down to several tens of nanometers. For detailed investigations a compact EUV-microscope has been realized utilizing OVI Balmer-alpha radiation at 17.3 nm coming from a discharge produced oxygen plasma. As optical elements a grazing incidence elliptical collector and a zone plate with a width of outermost zone of 50 nm and a spectral filter to avoid chromatic aberrations are used. The detector is a fast gated microchannel plate with a pore size of 2 microns contacted by a low impedance transmission line. The expected spatial resolution of the setup is better than 100 nm and the time resolution is better than 1 ns. The newly developed EUV-microscope is a powerful tool for a wide field of investigations that need high time and spatial resolutions simultaneously.
机译：我们报告了我们在设计和构造紧凑型极紫外（EUV）泵探针显微镜方面所做的努力。目的是观察由飞秒（fs）激光脉冲诱导的纳米结构的形成。 fs-激光辐射与物质的独特相互作用过程为激光材料加工开辟了新的市场，因此，在过去的十年中，人们对其进行了积极的研究。最终的“低于100 nm”结构在光子学，生物技术，摩擦学表面设计，等离激元应用和纳米颗粒生产方面具有巨大的潜在优势。聚焦的fs激光辐射引起局部改性，从而导致高精度和可重复性的纳米结构。但是，人们对地层动力学的了解还不够。在该领域的研究需要高的时间和空间分辨率。 fs激光和EUV显微镜的组合提供了一种用于“原位”观察地层动力学的工具。作为要研究的示例性结构，我们在金薄膜上使用了纳米喷嘴，并在电介质上使用了周期性的表面结构（波纹）。将来，EUV泵探针显微镜将成为观察物理或生物过程的多功能工具。使用EUV光的显微镜能够检测到数十纳米以下的结构。为了进行详细研究，已经利用来自放电产生的氧等离子体的17.3 nm的OVI Balmer-alpha辐射实现了紧凑的EUV显微镜。作为光学元件，使用掠入射椭圆形收集器和最外层区域的宽度为50 nm的区域板和避免色差的光谱滤光片。该检测器是一个快速选通的微通道板，其孔径为2微米，与低阻抗传输线接触。装置的预期空间分辨率优于100 nm，时间分辨率优于1 ns。新开发的EUV显微镜是需要同时具有高时间和空间分辨率的广泛研究领域的强大工具。

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