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首页> 外文会议>EUV and X-ray optics: Synergy between laboratory and space II >Technologies for manufacturing of high angular resolution multilayer coated optics for the New Hard X-ray Mission
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Technologies for manufacturing of high angular resolution multilayer coated optics for the New Hard X-ray Mission

机译：用于新的硬X射线任务的高角分辨率多层镀膜光学元件的制造技术

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In the frame of the technology development to be used for the Optical Payload of next future X-ray missions (such as e.g. New Hard X-ray Mission-ASI), a new set of manufacturing techniques were finalized by Media Lario Technologies (MLT), in collaboration with the Italian Space Agency (ASI) and the Brera Astronomical Observatory (INAF/OAB). The set of new technologies includes master manufacturing machines and processes, electroforming method, a vertical optical bench and metrology machines to support manufacturing and integration of mirrors. A magnetron sputtering PVD machine was upgraded and a Pt/C development study has been performed on the basis of the W/Si results obtained in the first phase of the study. New manufacturing technologies for highly accurate masters were developed and tested by mean of two full-size masters together with several dummies. A number of ultrathin Nickel-Cobalt focusing mirrors were manufactured via galvanic replication process from the masters and coated with Pt/C multilayer. Tests on substrate material, roughness and shape of the shell together with analysis on specimens were performed. Tests with AFM and XRR supported the development of the Pt/C multilayer which is the enabling technology for focusing high energy X-Rays. Several mirror shells were integrated into two demonstrator modules to assess the whole manufacturing process up to optical payload integration. The summary of the results from manufacturing and testing of specimens and mirror shells is reported in this paper together with a description of the technologies now available at MLT.
机译：在未来的X射线任务（例如New Hard X-ray Mission-ASI）的光学有效载荷所使用的技术开发框架中，Media Lario Technologies（MLT）最终确定了一套新的制造技术与意大利航天局（ASI）和布雷拉天文台（INAF / OAB）合作。这套新技术包括主制造机器和工艺，电铸方法，垂直光学平台和支持镜子制造和集成的计量机器。磁控溅射PVD机已升级，并且已根据研究第一阶段获得的W / Si结果进行了Pt / C开发研究。借助两个全尺寸母版和几个虚拟模型，开发并测试了用于高精度母版的新制造技术。通过原版通过电复制工艺制造了许多超薄镍钴聚焦镜，并在其上镀了Pt / C多层膜。对基材的材料，外壳的粗糙度和形状进行了测试，并对样品进行了分析。用AFM和XRR进行的测试支持了Pt / C多层板的开发，这是使高能X射线聚焦的使能技术。将多个镜壳集成到两个演示器模块中，以评估整个制造过程，直至光学有效载荷集成。本文报告了样品和镜壳的制造和测试结果的摘要，并介绍了MLT现在可用的技术。

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