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Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

机译：LPP EUV源的激光脉冲与Sn液滴靶之间的初始相互作用和等离子体前形成的建模

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We develop a new simulation code for the optimization of efficiency of the laser pumped plasma (LPP) extreme ultra violet (EUV) light source, which is applicable to the pre-plasma formation from a tin droplet target irradiated by a pre-pulse laser. We investigate algorithms of reorganization of the mesh for the Lagrangian hydrodynamics simulation. We also investigate the model of the liquid to gas phase transition to calculate the dynamics of particle formation through the laser ablation.

机译：我们开发了一个新的仿真代码，用于优化激光泵浦等离子体（LPP）极紫外（EUV）光源的效率，该代码适用于由预脉冲激光照射的锡滴靶形成的等离子体。我们研究了用于拉格朗日流体动力学模拟的网格重组算法。我们还研究了液相到气相的转变模型，以计算通过激光烧蚀形成颗粒的动力学。

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来源
《Extreme ultraviolet (EUV) lithography VII》|2016年|97762C.1-97762C.6|共6页
会议地点 San Jose CA(US)
作者
Akira Sasaki; Katsunobu Nishihara; Atsushi Sunahara; Hiroyuki Furukawa; Takeshi Nishikawa;
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作者单位

Japan Atomic Energy Agency, Kizugawashi, Kyoto, Japan;

Institute for Laser Engineering, Osaka University, Suita, Osaka, Japan;

Institute for Laser Technology, Osaka, Japan;

Institute for Laser Technology, Osaka, Japan;

Okayama University, Okayama, Japan;

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原文格式 PDF
正文语种 eng
中图分类
关键词
EUV source; laser produced plasma; modeling; simulation; hydrodynamics;

机译：EUV来源；激光产生的等离子体造型;模拟;流体力学;

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专利

1. Synthesis of arbitrary pulse waveforms in QCL-seeded ns-pulse CO2 laser for optimization of an LPP EUV source [J] . Nowak Krzysztof M., Kurosawa Yoshiaki, Suganuma Takashi, Optics Letters . 2016,第13期

机译：QCL种子ns脉冲CO2激光器中任意脉冲波形的合成，用于优化LPP EUV源
2. Cavity formation in a liquid Sn droplet driven by laser ablation pressure for an extreme ultraviolet light source target [J] . S. Yuspeh, Y. Ueno, M. S. Tillack, Journal of Applied Physics . 2011,第7Pta1期

机译：激光烧蚀压力驱动的液态锡液滴中的空穴形成，用于极紫外光源目标
3. The sources of super-high energetic electron at relativistic circularly-polarized laser-solid interactions in the presence of large scale pre-plasmas [J] . Wu D., Krasheninnikov S. I., Luan S. X., Physics of plasmas . 2016,第12期

机译：相对论圆极化激光-固体相互作用下超高能电子的存在
4. Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source [C] . Akira Sasaki, Katsunobu Nishihara, Atsushi Sunahara, Conference on extreme ultraviolet (EUV) lithography VII . 2016

机译：LPP EUV源激光脉冲与Sn液滴靶和SN液滴靶初始相互作用的建模和预血浆形成
5. Interaction of intense laser pulses with droplet and cluster sources: Application to extreme ultraviolet lithography and plasma waveguide generation. [D] . Sheng, Hua. 2006

机译：强激光脉冲与液滴和团簇源的相互作用：在极端紫外光刻和等离子体波导生成中的应用。
6. Generation of Subsurface Voids Incubation Effectand Formation of Nanoparticles in Short Pulse Laser Interactions withBulk Metal Targets in Liquid: Molecular Dynamics Study [O] . Cheng-Yu Shih, Maxim V. Shugaev, Chengping Wu, -1

机译：地下空隙的产生孵化效应短脉冲激光相互作用中纳米粒子的合成与形成液体中的大块金属靶：分子动力学研究
7. Present Status and Future of EUV (Extreme Ultra Violet) Light Source Research 4.Laser Produced Plasma Light Sources 4.1Present Status of Laser Produced Plasma EUV Sources Development [O] . Toshihisa TOMIE 2003

机译：EUV（极端超紫色）光源研究的现状和未来4.Aser产生的等离子体光源4.1激光产生的等离子体EUV源开发

Modeling of initial interaction between the laser pulse and Sn droplet target and pre-plasma formation for the LPP EUV source

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