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首页> 外文会议>Ferroelectric Thin Films XII >Single- and Multi-target Pulsed Laser Deposition of Thin BSTO films: Preparation, Microstructure and Electrical Properties
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Single- and Multi-target Pulsed Laser Deposition of Thin BSTO films: Preparation, Microstructure and Electrical Properties

机译：BSTO薄膜的单靶和多靶脉冲激光沉积：制备，微结构和电性能

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A comparative study of microstructure and electrical properties of Ba_xSr_(1-x)TiO_3 films made by single- and multi-target pulsed laser deposition was carried out. The films were epitaxially grown on both LaAlO_3 and MgO substrates. The structural properties of all samples were investigated using X-ray diffraction and Raman spectroscopy. The elemental composition of the samples was investigated using energy dispersive X-ray analysis. For electrical properties examination, a simple capacitor structure was patterned on the film surface. Thin films made using both methods exhibit similar structural and electrical properties; however the samples made by a multi-target method underwent phase transition in a broader temperature region. The results prove the possibility of using the multi-target pulse laser deposition as a more flexible method for engineering thin film stoichometry.
机译：对单靶和多靶脉冲激光沉积制备的Ba_xSr_（1-x）TiO_3薄膜的微观结构和电性能进行了比较研究。薄膜在LaAlO_3和MgO衬底上外延生长。使用X射线衍射和拉曼光谱研究了所有样品的结构性质。使用能量色散X射线分析研究了样品的元素组成。为了检查电性能，在薄膜表面上构图了一个简单的电容器结构。两种方法制得的薄膜都具有相似的结构和电性能。然而，通过多目标方法制得的样品在较宽的温度范围内发生了相变。结果证明了使用多目标脉冲激光沉积作为工程薄膜化学计量的更灵活方法的可能性。

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