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首页> 外文会议>Ferroelectric Thin Films XII >Ferroelectric Domain Structure and Local Piezoelectric Properties of Sol-Gel Derived Pb(Zr_(1-x)Ti_x)O_3 Films
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Ferroelectric Domain Structure and Local Piezoelectric Properties of Sol-Gel Derived Pb(Zr_(1-x)Ti_x)O_3 Films

机译：溶胶-凝胶衍生的Pb（Zr_（1-x）Ti_x）O_3薄膜的铁电畴结构和局部压电性能

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摘要

High-resolution domain studies are performed on Pb(Zr_(1-x)Ti_x)O_3 (PZT) films of different thicknesses and compositions (x=0.30, 0.48, and 0.70) by piezoresponse force microscopy (PFM). Depending on the composition, the orientation of the films is varied from purely (111) (related to the orientation of Pt bottom electrode) to a more random texture. Statistical processing of the obtained domain images is used to analyze the correlation between the composition of the films and their nanoscale piezoelectric properties. It is shown that the virgin (unpoled) films possess large piezoelectric activity comparable to that after local poling (self-polarization effect). This corresponds to a clear predominance of the domains with polarization oriented from the free surface of the film to the bottom electrode. Both the average piezoelectric signal and half-width of the piezoelectric histograms depend on the composition and thickness of the films. The largest local piezoelectric coefficient and the broadest distribution are found for tetragonal (x=0.70) films with almost pure (111) texture. The results are discussed in terms of texture and PFM instrumentation effects on local piezoelectric measurements.
机译：通过压电响应力显微镜（PFM）对不同厚度和成分（x = 0.30、0.48和0.70）的Pb（Zr_（1-x）Ti_x）O_3（PZT）薄膜进行了高分辨率领域研究。取决于组成，薄膜的方向从纯粹的（111）（与Pt底部电极的方向有关）到更随机的纹理。对获得的畴图像进行统计处理，以分析膜的成分与其纳米级压电性能之间的相关性。结果表明，原始（未极化）的薄膜具有与局部极化后相当的大压电活性（自极化作用）。这对应于从薄膜的自由表面到底部电极具有极化取向的畴的明显优势。压电信号的平均压电信号和压电直方图的半宽度都取决于薄膜的成分和厚度。发现具有几乎纯净的（111）织构的四边形（x = 0.70）薄膜具有最大的局部压电系数和最宽的分布。根据质地和PFM仪器对局部压电测量的影响来讨论结果。

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