Multimode parameter fuzzy self-tuning PID precise temperature control system

机译：多模参数模糊自整定PID精确温度控制系统

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In this paper, lithography projection objective precision temperature control system is designed study. The system mainly consists of a PID controller, heating tanks, cooling module and circulation piping systems. To achieve ultra-precision temperature control, we studied the control algorithm and selected the multimode parameter fuzzy self-tuning PID control method finally. And we have built the experimental prototype to conduct the experiment that using other thermal load instead of the thermal load of the projection objective, the experimental results demonstrate that the system is stable and fast response, circulating water temperature can reach the set temperature in a short time and fluctuate within a range of ± 0.01 °C.

机译：本文设计了光刻投影物镜精密温度控制系统。该系统主要由PID控制器，加热箱，冷却模块和循环管道系统组成。为了实现超精密温度控制，我们研究了控制算法，最后选择了多模式参数模糊自整定PID控制方法。并建立了实验样机进行实验，使用其他热负荷代替投影物镜的热负荷，实验结果表明系统稳定，响应速度快，循环水温度可在短时间内达到设定温度。时间并在±0.01°C的范围内波动。

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来源
《Fifth Asia International Symposium on Mechatronics》|2015年|1-4|共4页
会议地点 Guilin(CN)
作者
H. Wang; Z. W. Xiao; H. B. Liu; L. T. Liu;
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作者单位

School of Mechatronics Engineering, University of Electronic Science and Technology of China, Chengdu, China;

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原文格式 PDF
正文语种 eng
中图分类
关键词
PID controller; fuzzy control; multimode; self-tuning; ultra-precision temperature;

机译：PID控制器；模糊控制；多模式；自整定；超高精度温度;

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专利

1. Design of PID parameters self-tuning Fuzzy Control System and Its Application in Hydroelectric System [J] . LIU HONGLING, JIANG CHUANWEN, ZHANG YAN WSEAS Transactions on Circuits and Systems . 2006,第5期

机译：PID参数自整定模糊控制系统的设计及其在水电系统中的应用
2. REAL TIME STEAM TEMPERATURE REGULATION USING SELF-TUNING FUZZY PID CONTROLLER ON HYDRO- DIFFUSION ESSENTIAL OIL EXTRACTION SYSTEM [J] . Zakiah Mohd Yusoff, Zuraida Muhammad, Mohd Hezri Fazalul Rahiman, International Journal on Smart Sensing and Intelligent Systems . 2013,第5期

机译：水扩散精油萃取系统中自调节模糊PID控制器的实时蒸汽温度调节
3. Fuzzy self-tuning PID control of the operation temperatures in a two-staged membrane separation process [J] . Lei Wang, Wencai Du, Hai Wang, 天然气化学（英文版） . 2008,第004期

机译：两阶段膜分离过程中操作温度的模糊自校正PID控制
4. Multimode parameter fuzzy self-tuning PID precise temperature control system [C] . H. Wang, Z. W. Xiao, H. B. Liu, Asia International Symposium on Mechatronics . 2015

机译：多模参数模糊自调光PID精密温度控制系统
5. Design of a self-tuning fuzzy logic controller for system with variable time delay. [D] . Al-Ahmadi, Saleh O. 2002

机译：可变时滞系统的自调整模糊逻辑控制器设计。
6. Self-Tuning Fully-Connected PID Neural Network System for Distributed Temperature Sensing and Control of Instrument with Multi-Modules [O] . Zhen Zhang, Cheng Ma, Rong Zhu 2016

机译：用于多模块仪表的分布式温度传感和控制的自整定全连接PID神经网络系统
7. Fuzzy self-tuning PID on The Liquid State Ammonia Nitrate Storage Tank temperature control system [O] . Yue-sheng Wang, Jun-qiu Qu 2014

机译：液态氨硝酸盐储罐温度控制系统的模糊自调整PID

Multimode parameter fuzzy self-tuning PID precise temperature control system

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