APPLICATIONS OF MICROWAVE NONDESTRUCTIVE TESTING IN IC

机译：微波无损检测在集成电路中的应用

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A novel method for the measurement of the complex permittivity of substrates is presented. The complex permittivity of the sample, which is placed outside of an open-ended rectangular wavequide is evaluated from the reflection coefficient of this flanged-mounted wavequide. The results show that this method is very simple, accurate and nondestructive. The delamination in IC packages is detected successfully utilizing open-ended coaxial line sensor. Good resolution and high sensitivity makes it possible to detect defects of small dimension.

机译：提出了一种测量基体复介电常数的新方法。从该带法兰安装的波导管的反射系数评估放置在开放式矩形波导管外面的样品的复介电常数。结果表明，该方法非常简单，准确，无损。使用开放式同轴线传感器可以成功检测到IC封装中的分层。良好的分辨率和高灵敏度使检测小尺寸缺陷成为可能。

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来源
《Fifth International Conference on Electronic Measurement amp; Instruments (ICEMI'2001) Vol.1 Nov 18-21, 2001 Guilin, China》|2001年|p.284-287|共4页
会议地点 Guilin(CN);Guilin(CN)
作者
Zhao QingLing; Zhang Jin;
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作者单位

Taiyuan University of Technology Information Engineering College, Taiyuan China 030024;

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会议组织
原文格式 PDF
正文语种 eng
中图分类机械、仪表工业;
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APPLICATIONS OF MICROWAVE NONDESTRUCTIVE TESTING IN IC

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