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首页> 外文会议>Fifth International Conference on Optical and Photonics Engineering >Controlled Micro-wrinkling of Ultrathin Indium-Tin-Oxide Films for Transparency Tuning
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Controlled Micro-wrinkling of Ultrathin Indium-Tin-Oxide Films for Transparency Tuning

机译：用于透明度调节的超薄铟锡氧化物薄膜的可控微皱纹

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Smart windows can electrically switch between clear and opaque states. Current smart windows based on polymer dispersed liquid crystal are expensive and they have moderate range of transparency tuning. Elastomeric tunable window devices are being researched as the low-cost alternates. They consist of a transparent elastomer substrate with surface electrodes that provide electrically controlled micro-wrinkling. They diffusely scatter the transmitted light and thus appear opaque when the surfaces are micro-wrinkled. On electrical activation the wrinkles are flattened, thus making the windows transparent like window blinds. However, the initial prototypes of these electrically tunable window devices showed limited transparency tuning because their transparent electrodes cannot be completely flattened. For example, the brownish e-beam evaporated indium-tin-oxide thin films (50 nm thick) remains mildly wrinkled (with 52.08% transmittance) even when subjected to 37% areal expansion, while its opaque state allows 39.14% transmittance. There is a need for more transparent thin-film electrode with better controllability of surface micro-wrinkling. This work reports a greatly improved tunable window device with enlarged range of transmittance tuning: a clear state of 71.5% transmittance and an opaque state of 2% transmittance. This new device made use of ultra-thin (6 nm) ITO thin films as the transparent compliant electrodes, which were initially wrinkled and can be flatten by 12.2% voltage-induced areal expansion. These ultra-thin ITO thin films are clearer with fewer thermally-induced wrinkles on the flat elastomer substrate (VHB 4905) as they were deposited at a lower surface growth temperature using the RF magnetron sputtering technique. In addition, they make compliant electrodes of higher electrical conductivity and can electrically unfold the mechanically induced micro-wrinkles by a small voltage-induced areal expansion (～12.2%). With the greatly enhanced performance, this electrically tunable window device is promising approach for low-cost smart windows.
机译：智能窗口可以在透明状态和不透明状态之间进行电切换。当前基于聚合物分散液晶的智能窗价格昂贵，并且它们具有适度的透明度调节范围。弹性可调窗口设备正在作为低成本替代品进行研究。它们由带有表面电极的透明弹性体基材组成，该表面电极可提供电控微皱纹。它们会散射散射的透射光，因此当表面微皱时显得不透明。电激活时，皱纹会变平，从而使窗户像百叶窗一样透明。然而，这些电可调窗装置的初始原型显示出有限的透明度调节，因为它们的透明电极不能完全变平。例如，即使经受37％的面膨胀，带褐色的电子束蒸发的铟锡氧化物薄膜（50 nm厚）仍保持轻微起皱（透射率为52.08％），而其不透明状态允许39.14％的透射率。需要具有更好的表面微皱纹可控性的更透明的薄膜电极。这项工作报告了一种大大改进的可调窗口设备，其透射率调整范围更大：透明状态的透射率为71.5％，不透明状态的透射率为2％。这款新设备使用超薄（6 nm）ITO薄膜作为透明顺应性电极，这些电极最初起皱，并且可以通过12.2％电压引起的面膨胀而变平。这些超薄ITO薄膜更透明，在平坦的弹性体基板（VHB 4905）上具有较少的热诱导皱纹，因为它们是使用RF磁控溅射技术在较低的表面生长温度下沉积的。此外，它们使导电电极具有更高的电导率，并且可以通过较小的电压感应面膨胀（〜12.2％）使机械感应的微皱纹电展开。随着性能的大大提高，这种电可调式窗户设备是低成本智能窗户的有前途的方法。

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